Matches in SemOpenAlex for { <https://semopenalex.org/work/W2141661595> ?p ?o ?g. }
Showing items 1 to 92 of
92
with 100 items per page.
- W2141661595 abstract "High aspect ratio etching of metals has been attained by the irradiation of infrared laser in an inert liquid with low vaporization energy and low ratio of coefficient of viscosity to specific gravity. In-situ cross sectional observation at the irradiation point appealed the mechanism of laser etching in a liquid in detail. The mechanism is the following: micro bubbles in the liquid are produced when the laser is irradiated, the bubbles generate a local upward stream in the liquid, the stream removes debris produced by the laser etching, therefore the etching is efficiently occurred by this mechanism and high aspect ratio etching is attained." @default.
- W2141661595 created "2016-06-24" @default.
- W2141661595 creator A5020333874 @default.
- W2141661595 creator A5036700937 @default.
- W2141661595 creator A5043697341 @default.
- W2141661595 creator A5066057500 @default.
- W2141661595 date "2002-11-22" @default.
- W2141661595 modified "2023-09-25" @default.
- W2141661595 title "High aspect ratio etching by infrared laser induced micro bubbles" @default.
- W2141661595 cites W2087985293 @default.
- W2141661595 cites W2144287514 @default.
- W2141661595 cites W2518514700 @default.
- W2141661595 doi "https://doi.org/10.1109/memsys.1997.581796" @default.
- W2141661595 hasPublicationYear "2002" @default.
- W2141661595 type Work @default.
- W2141661595 sameAs 2141661595 @default.
- W2141661595 citedByCount "5" @default.
- W2141661595 countsByYear W21416615952012 @default.
- W2141661595 countsByYear W21416615952013 @default.
- W2141661595 countsByYear W21416615952015 @default.
- W2141661595 countsByYear W21416615952021 @default.
- W2141661595 countsByYear W21416615952022 @default.
- W2141661595 crossrefType "proceedings-article" @default.
- W2141661595 hasAuthorship W2141661595A5020333874 @default.
- W2141661595 hasAuthorship W2141661595A5036700937 @default.
- W2141661595 hasAuthorship W2141661595A5043697341 @default.
- W2141661595 hasAuthorship W2141661595A5066057500 @default.
- W2141661595 hasConcept C100460472 @default.
- W2141661595 hasConcept C111337013 @default.
- W2141661595 hasConcept C113196181 @default.
- W2141661595 hasConcept C120665830 @default.
- W2141661595 hasConcept C121332964 @default.
- W2141661595 hasConcept C1291036 @default.
- W2141661595 hasConcept C130472188 @default.
- W2141661595 hasConcept C159985019 @default.
- W2141661595 hasConcept C178790620 @default.
- W2141661595 hasConcept C185544564 @default.
- W2141661595 hasConcept C185592680 @default.
- W2141661595 hasConcept C192562407 @default.
- W2141661595 hasConcept C195801359 @default.
- W2141661595 hasConcept C2779227376 @default.
- W2141661595 hasConcept C43617362 @default.
- W2141661595 hasConcept C49040817 @default.
- W2141661595 hasConcept C520434653 @default.
- W2141661595 hasConcept C55766333 @default.
- W2141661595 hasConcept C82558694 @default.
- W2141661595 hasConceptScore W2141661595C100460472 @default.
- W2141661595 hasConceptScore W2141661595C111337013 @default.
- W2141661595 hasConceptScore W2141661595C113196181 @default.
- W2141661595 hasConceptScore W2141661595C120665830 @default.
- W2141661595 hasConceptScore W2141661595C121332964 @default.
- W2141661595 hasConceptScore W2141661595C1291036 @default.
- W2141661595 hasConceptScore W2141661595C130472188 @default.
- W2141661595 hasConceptScore W2141661595C159985019 @default.
- W2141661595 hasConceptScore W2141661595C178790620 @default.
- W2141661595 hasConceptScore W2141661595C185544564 @default.
- W2141661595 hasConceptScore W2141661595C185592680 @default.
- W2141661595 hasConceptScore W2141661595C192562407 @default.
- W2141661595 hasConceptScore W2141661595C195801359 @default.
- W2141661595 hasConceptScore W2141661595C2779227376 @default.
- W2141661595 hasConceptScore W2141661595C43617362 @default.
- W2141661595 hasConceptScore W2141661595C49040817 @default.
- W2141661595 hasConceptScore W2141661595C520434653 @default.
- W2141661595 hasConceptScore W2141661595C55766333 @default.
- W2141661595 hasConceptScore W2141661595C82558694 @default.
- W2141661595 hasLocation W21416615951 @default.
- W2141661595 hasOpenAccess W2141661595 @default.
- W2141661595 hasPrimaryLocation W21416615951 @default.
- W2141661595 hasRelatedWork W1498257573 @default.
- W2141661595 hasRelatedWork W1973839490 @default.
- W2141661595 hasRelatedWork W1976728427 @default.
- W2141661595 hasRelatedWork W1991564398 @default.
- W2141661595 hasRelatedWork W2001687566 @default.
- W2141661595 hasRelatedWork W2002002551 @default.
- W2141661595 hasRelatedWork W2015780564 @default.
- W2141661595 hasRelatedWork W2017994057 @default.
- W2141661595 hasRelatedWork W2021003999 @default.
- W2141661595 hasRelatedWork W2037358811 @default.
- W2141661595 hasRelatedWork W2038147320 @default.
- W2141661595 hasRelatedWork W2041203108 @default.
- W2141661595 hasRelatedWork W2048637357 @default.
- W2141661595 hasRelatedWork W2049565641 @default.
- W2141661595 hasRelatedWork W2071273527 @default.
- W2141661595 hasRelatedWork W2079197072 @default.
- W2141661595 hasRelatedWork W2087985293 @default.
- W2141661595 hasRelatedWork W2187676026 @default.
- W2141661595 hasRelatedWork W2350467249 @default.
- W2141661595 hasRelatedWork W3145476873 @default.
- W2141661595 isParatext "false" @default.
- W2141661595 isRetracted "false" @default.
- W2141661595 magId "2141661595" @default.
- W2141661595 workType "article" @default.