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- W2141661611 abstract "In the present paper an overview is given over the impact that the changing backend deposition technologies have on stripping / cleaning and the photoresist development area. Three areas will be discussed with great detail: (a) Dielectric deposition, (b) metallization, and (c) lithography. As device nodes keep shrinking and, concurrently, the speed of semiconductor devices increases, new dielectric and conductor materials were needed, and have been introduced. This had, and will have, a tremendous impact on the way wafers are being stripped and cleaned. Conventional technologies, such ashing and wet clean, might no longer be applicable for certain applications. At the same time, in the lithography area, pattern collapse, in particular at around the 100 nm technology node, will become a big issue. In the present paper all of the above issues are addressed and potential solutions are offered." @default.
- W2141661611 created "2016-06-24" @default.
- W2141661611 creator A5019941291 @default.
- W2141661611 date "2002-11-13" @default.
- W2141661611 modified "2023-09-24" @default.
- W2141661611 title "The impact of changes in the backend deposition technologies on wafer cleaning for sub 130 nm devices" @default.
- W2141661611 doi "https://doi.org/10.1109/icsict.2001.981513" @default.
- W2141661611 hasPublicationYear "2002" @default.
- W2141661611 type Work @default.
- W2141661611 sameAs 2141661611 @default.
- W2141661611 citedByCount "1" @default.
- W2141661611 crossrefType "proceedings-article" @default.
- W2141661611 hasAuthorship W2141661611A5019941291 @default.
- W2141661611 hasConcept C117671659 @default.
- W2141661611 hasConcept C121332964 @default.
- W2141661611 hasConcept C127313418 @default.
- W2141661611 hasConcept C127413603 @default.
- W2141661611 hasConcept C133386390 @default.
- W2141661611 hasConcept C134406635 @default.
- W2141661611 hasConcept C151730666 @default.
- W2141661611 hasConcept C159985019 @default.
- W2141661611 hasConcept C160671074 @default.
- W2141661611 hasConcept C171250308 @default.
- W2141661611 hasConcept C177409738 @default.
- W2141661611 hasConcept C192562407 @default.
- W2141661611 hasConcept C204223013 @default.
- W2141661611 hasConcept C2779227376 @default.
- W2141661611 hasConcept C2816523 @default.
- W2141661611 hasConcept C2987888538 @default.
- W2141661611 hasConcept C41008148 @default.
- W2141661611 hasConcept C41952129 @default.
- W2141661611 hasConcept C49040817 @default.
- W2141661611 hasConcept C53524968 @default.
- W2141661611 hasConcept C61696701 @default.
- W2141661611 hasConcept C62520636 @default.
- W2141661611 hasConcept C62611344 @default.
- W2141661611 hasConcept C64297162 @default.
- W2141661611 hasConcept C66018809 @default.
- W2141661611 hasConcept C66938386 @default.
- W2141661611 hasConcept C99293441 @default.
- W2141661611 hasConceptScore W2141661611C117671659 @default.
- W2141661611 hasConceptScore W2141661611C121332964 @default.
- W2141661611 hasConceptScore W2141661611C127313418 @default.
- W2141661611 hasConceptScore W2141661611C127413603 @default.
- W2141661611 hasConceptScore W2141661611C133386390 @default.
- W2141661611 hasConceptScore W2141661611C134406635 @default.
- W2141661611 hasConceptScore W2141661611C151730666 @default.
- W2141661611 hasConceptScore W2141661611C159985019 @default.
- W2141661611 hasConceptScore W2141661611C160671074 @default.
- W2141661611 hasConceptScore W2141661611C171250308 @default.
- W2141661611 hasConceptScore W2141661611C177409738 @default.
- W2141661611 hasConceptScore W2141661611C192562407 @default.
- W2141661611 hasConceptScore W2141661611C204223013 @default.
- W2141661611 hasConceptScore W2141661611C2779227376 @default.
- W2141661611 hasConceptScore W2141661611C2816523 @default.
- W2141661611 hasConceptScore W2141661611C2987888538 @default.
- W2141661611 hasConceptScore W2141661611C41008148 @default.
- W2141661611 hasConceptScore W2141661611C41952129 @default.
- W2141661611 hasConceptScore W2141661611C49040817 @default.
- W2141661611 hasConceptScore W2141661611C53524968 @default.
- W2141661611 hasConceptScore W2141661611C61696701 @default.
- W2141661611 hasConceptScore W2141661611C62520636 @default.
- W2141661611 hasConceptScore W2141661611C62611344 @default.
- W2141661611 hasConceptScore W2141661611C64297162 @default.
- W2141661611 hasConceptScore W2141661611C66018809 @default.
- W2141661611 hasConceptScore W2141661611C66938386 @default.
- W2141661611 hasConceptScore W2141661611C99293441 @default.
- W2141661611 hasLocation W21416616111 @default.
- W2141661611 hasOpenAccess W2141661611 @default.
- W2141661611 hasPrimaryLocation W21416616111 @default.
- W2141661611 hasRelatedWork W1518726324 @default.
- W2141661611 hasRelatedWork W1541519112 @default.
- W2141661611 hasRelatedWork W2019813628 @default.
- W2141661611 hasRelatedWork W2063687185 @default.
- W2141661611 hasRelatedWork W2075722641 @default.
- W2141661611 hasRelatedWork W2108879228 @default.
- W2141661611 hasRelatedWork W2121888861 @default.
- W2141661611 hasRelatedWork W2135545402 @default.
- W2141661611 hasRelatedWork W2139920649 @default.
- W2141661611 hasRelatedWork W2156467228 @default.
- W2141661611 hasRelatedWork W2164528583 @default.
- W2141661611 hasRelatedWork W2332241268 @default.
- W2141661611 hasRelatedWork W2382602681 @default.
- W2141661611 hasRelatedWork W2537983622 @default.
- W2141661611 hasRelatedWork W2543121554 @default.
- W2141661611 hasRelatedWork W2611766893 @default.
- W2141661611 hasRelatedWork W3200281295 @default.
- W2141661611 hasRelatedWork W3201276869 @default.
- W2141661611 hasRelatedWork W589744691 @default.
- W2141661611 hasRelatedWork W2093885581 @default.
- W2141661611 isParatext "false" @default.
- W2141661611 isRetracted "false" @default.
- W2141661611 magId "2141661611" @default.
- W2141661611 workType "article" @default.