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- W2141783318 abstract "Self-organized Si suboxide (SiO/sub x/, x<2) interfacial layers were characterised by medium energy ion scattering, single wavelength ellipsometry, synchrotron X-ray photoelectron spectroscopy and optical second harmonic generation." @default.
- W2141783318 created "2016-06-24" @default.
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- W2141783318 date "2003-01-01" @default.
- W2141783318 modified "2023-09-25" @default.
- W2141783318 title "Self-organized Si suboxide (SiO<sub>x</sub>, x<2) interfacial layers - optimization of performance and reliability in advanced devices" @default.
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- W2141783318 doi "https://doi.org/10.1109/iwgi.2003.159187" @default.
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