FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2141832094> ?p ?o ?g. }

• W2141832094 abstract "We present the design, process flow and packaging scheme for a novel 3D capacitive MEMS pressure sensor. These sensors present a paradigm shift in pressure sensor technology. They contain an array of vertical diaphragms perpendicular to the wafer plane where each pair of diaphragms requires orders of magnitude lower footprint than traditional in-plane sensors. The sensor can be arrayed or scaled up for increased sensitivity and can be absolute, gauge or differential. Fabrication requires 2-4 masks depending on process flow and has been greatly simplified, without reduction in performance, for high yield and low cost. Multiple geometries have been modeled with sensitivities reaching several fF/kPa and temperature characteristics better than conventional devices. Pressure and electrical ports are individually interchangeable between front and back sides. This allows for a simple design that has only Si facing the sensing environment and the electrical connections on the backside." @default.
• W2141832094 created "2016-06-24" @default.
• W2141832094 creator A5004459615 @default.
• W2141832094 creator A5018711887 @default.
• W2141832094 creator A5066599481 @default.
• W2141832094 date "2006-10-04" @default.
• W2141832094 modified "2023-09-26" @default.
• W2141832094 title "3-dimensional scalable pressure sensors: device and process design" @default.
• W2141832094 cites W1896465745 @default.
• W2141832094 cites W2008943021 @default.
• W2141832094 cites W2027872603 @default.
• W2141832094 cites W2035394251 @default.
• W2141832094 cites W2036098998 @default.
• W2141832094 cites W2120104699 @default.
• W2141832094 cites W2158236626 @default.
• W2141832094 cites W2211677109 @default.
• W2141832094 doi "https://doi.org/10.1109/icsens.2004.1426218" @default.
• W2141832094 hasPublicationYear "2006" @default.
• W2141832094 type Work @default.
• W2141832094 sameAs 2141832094 @default.
• W2141832094 citedByCount "1" @default.
• W2141832094 crossrefType "proceedings-article" @default.
• W2141832094 hasAuthorship W2141832094A5004459615 @default.
• W2141832094 hasAuthorship W2141832094A5018711887 @default.
• W2141832094 hasAuthorship W2141832094A5066599481 @default.
• W2141832094 hasConcept C111919701 @default.
• W2141832094 hasConcept C119599485 @default.
• W2141832094 hasConcept C121332964 @default.
• W2141832094 hasConcept C127413603 @default.
• W2141832094 hasConcept C132943942 @default.
• W2141832094 hasConcept C136525101 @default.
• W2141832094 hasConcept C142724271 @default.
• W2141832094 hasConcept C151730666 @default.
• W2141832094 hasConcept C160671074 @default.
• W2141832094 hasConcept C17525397 @default.
• W2141832094 hasConcept C192562407 @default.
• W2141832094 hasConcept C199631012 @default.
• W2141832094 hasConcept C204787440 @default.
• W2141832094 hasConcept C206755178 @default.
• W2141832094 hasConcept C21200559 @default.
• W2141832094 hasConcept C24326235 @default.
• W2141832094 hasConcept C2524010 @default.
• W2141832094 hasConcept C30066665 @default.
• W2141832094 hasConcept C33923547 @default.
• W2141832094 hasConcept C37977207 @default.
• W2141832094 hasConcept C41008148 @default.
• W2141832094 hasConcept C41325743 @default.
• W2141832094 hasConcept C48044578 @default.
• W2141832094 hasConcept C49040817 @default.
• W2141832094 hasConcept C62520636 @default.
• W2141832094 hasConcept C71924100 @default.
• W2141832094 hasConcept C77088390 @default.
• W2141832094 hasConcept C78519656 @default.
• W2141832094 hasConcept C80264047 @default.
• W2141832094 hasConcept C86803240 @default.
• W2141832094 hasConcept C98045186 @default.
• W2141832094 hasConceptScore W2141832094C111919701 @default.
• W2141832094 hasConceptScore W2141832094C119599485 @default.
• W2141832094 hasConceptScore W2141832094C121332964 @default.
• W2141832094 hasConceptScore W2141832094C127413603 @default.
• W2141832094 hasConceptScore W2141832094C132943942 @default.
• W2141832094 hasConceptScore W2141832094C136525101 @default.
• W2141832094 hasConceptScore W2141832094C142724271 @default.
• W2141832094 hasConceptScore W2141832094C151730666 @default.
• W2141832094 hasConceptScore W2141832094C160671074 @default.
• W2141832094 hasConceptScore W2141832094C17525397 @default.
• W2141832094 hasConceptScore W2141832094C192562407 @default.
• W2141832094 hasConceptScore W2141832094C199631012 @default.
• W2141832094 hasConceptScore W2141832094C204787440 @default.
• W2141832094 hasConceptScore W2141832094C206755178 @default.
• W2141832094 hasConceptScore W2141832094C21200559 @default.
• W2141832094 hasConceptScore W2141832094C24326235 @default.
• W2141832094 hasConceptScore W2141832094C2524010 @default.
• W2141832094 hasConceptScore W2141832094C30066665 @default.
• W2141832094 hasConceptScore W2141832094C33923547 @default.
• W2141832094 hasConceptScore W2141832094C37977207 @default.
• W2141832094 hasConceptScore W2141832094C41008148 @default.
• W2141832094 hasConceptScore W2141832094C41325743 @default.
• W2141832094 hasConceptScore W2141832094C48044578 @default.
• W2141832094 hasConceptScore W2141832094C49040817 @default.
• W2141832094 hasConceptScore W2141832094C62520636 @default.
• W2141832094 hasConceptScore W2141832094C71924100 @default.
• W2141832094 hasConceptScore W2141832094C77088390 @default.
• W2141832094 hasConceptScore W2141832094C78519656 @default.
• W2141832094 hasConceptScore W2141832094C80264047 @default.
• W2141832094 hasConceptScore W2141832094C86803240 @default.
• W2141832094 hasConceptScore W2141832094C98045186 @default.
• W2141832094 hasLocation W21418320941 @default.
• W2141832094 hasOpenAccess W2141832094 @default.
• W2141832094 hasPrimaryLocation W21418320941 @default.
• W2141832094 hasRelatedWork W1979273981 @default.
• W2141832094 hasRelatedWork W2024628330 @default.
• W2141832094 hasRelatedWork W2051552112 @default.
• W2141832094 hasRelatedWork W2093036342 @default.
• W2141832094 hasRelatedWork W2117426074 @default.
• W2141832094 hasRelatedWork W2119306003 @default.
• W2141832094 hasRelatedWork W2120568298 @default.
• W2141832094 hasRelatedWork W2122016971 @default.
• W2141832094 hasRelatedWork W2136318652 @default.
• W2141832094 hasRelatedWork W2148233968 @default.

• next