Matches in SemOpenAlex for { <https://semopenalex.org/work/W2141950592> ?p ?o ?g. }
Showing items 1 to 62 of
62
with 100 items per page.
- W2141950592 abstract "Transmission electron microscopy (TEM) has played an important role in silicon VLSI/ULSI process evaluation and failure analysis. More recently, it has also been applied to micro-electro-machine system (MEMS), MCM, ...etc. In this talk, a few recent TEM application developments are presented. Some of these TEM applications may seem very difficult or impossible previously. These new applications are made possible by innovative sample preparation break through." @default.
- W2141950592 created "2016-06-24" @default.
- W2141950592 creator A5010068396 @default.
- W2141950592 creator A5026382680 @default.
- W2141950592 creator A5063797577 @default.
- W2141950592 date "2002-11-28" @default.
- W2141950592 modified "2023-09-26" @default.
- W2141950592 title "The recent TEM application development for microelectronics" @default.
- W2141950592 cites W1964887126 @default.
- W2141950592 cites W1998658477 @default.
- W2141950592 cites W2161217037 @default.
- W2141950592 doi "https://doi.org/10.1109/icsict.1998.785884" @default.
- W2141950592 hasPublicationYear "2002" @default.
- W2141950592 type Work @default.
- W2141950592 sameAs 2141950592 @default.
- W2141950592 citedByCount "0" @default.
- W2141950592 crossrefType "proceedings-article" @default.
- W2141950592 hasAuthorship W2141950592A5010068396 @default.
- W2141950592 hasAuthorship W2141950592A5026382680 @default.
- W2141950592 hasAuthorship W2141950592A5063797577 @default.
- W2141950592 hasConcept C111919701 @default.
- W2141950592 hasConcept C117671659 @default.
- W2141950592 hasConcept C127413603 @default.
- W2141950592 hasConcept C14580979 @default.
- W2141950592 hasConcept C146088050 @default.
- W2141950592 hasConcept C149635348 @default.
- W2141950592 hasConcept C171250308 @default.
- W2141950592 hasConcept C187937830 @default.
- W2141950592 hasConcept C192562407 @default.
- W2141950592 hasConcept C2988729646 @default.
- W2141950592 hasConcept C37977207 @default.
- W2141950592 hasConcept C41008148 @default.
- W2141950592 hasConcept C49040817 @default.
- W2141950592 hasConcept C544956773 @default.
- W2141950592 hasConcept C98045186 @default.
- W2141950592 hasConceptScore W2141950592C111919701 @default.
- W2141950592 hasConceptScore W2141950592C117671659 @default.
- W2141950592 hasConceptScore W2141950592C127413603 @default.
- W2141950592 hasConceptScore W2141950592C14580979 @default.
- W2141950592 hasConceptScore W2141950592C146088050 @default.
- W2141950592 hasConceptScore W2141950592C149635348 @default.
- W2141950592 hasConceptScore W2141950592C171250308 @default.
- W2141950592 hasConceptScore W2141950592C187937830 @default.
- W2141950592 hasConceptScore W2141950592C192562407 @default.
- W2141950592 hasConceptScore W2141950592C2988729646 @default.
- W2141950592 hasConceptScore W2141950592C37977207 @default.
- W2141950592 hasConceptScore W2141950592C41008148 @default.
- W2141950592 hasConceptScore W2141950592C49040817 @default.
- W2141950592 hasConceptScore W2141950592C544956773 @default.
- W2141950592 hasConceptScore W2141950592C98045186 @default.
- W2141950592 hasLocation W21419505921 @default.
- W2141950592 hasOpenAccess W2141950592 @default.
- W2141950592 hasPrimaryLocation W21419505921 @default.
- W2141950592 hasRelatedWork W1970939905 @default.
- W2141950592 hasRelatedWork W2499702522 @default.
- W2141950592 hasRelatedWork W3119352004 @default.
- W2141950592 hasRelatedWork W3195945115 @default.
- W2141950592 hasRelatedWork W3208851211 @default.
- W2141950592 isParatext "false" @default.
- W2141950592 isRetracted "false" @default.
- W2141950592 magId "2141950592" @default.
- W2141950592 workType "article" @default.