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- W2142039290 abstract "Under DARPA sponsorship, a compact superconducting X-ray lithography source (SLS) is being designed and built by the Brookhaven National Laboratory (BNL). This source is optimized for lithography work for submicron high-density computer chips, and is about the size of a billiard table (1.5 m*4.0 m). This machine has a racetrack configuration with two 180 degrees bending magnets. The machine will have 18 photon ports which would deliver light peaked at a wavelength of 10 AA. The authors describe the major features of this device. The commercial machine will be equipped with a fully automated user-friendly control system, major features of which are already working on a compact warm dipole ring at BNL. This ring has normal dipole magnets with dimensions identical to the SXLS device, and has been successfully commissioned. >" @default.
- W2142039290 created "2016-06-24" @default.
- W2142039290 creator A5000988939 @default.
- W2142039290 creator A5018321935 @default.
- W2142039290 creator A5033056137 @default.
- W2142039290 date "2002-12-09" @default.
- W2142039290 modified "2023-09-24" @default.
- W2142039290 title "The DARPA compact superconducting X-ray lithography source features" @default.
- W2142039290 doi "https://doi.org/10.1109/pac.1991.165060" @default.
- W2142039290 hasPublicationYear "2002" @default.
- W2142039290 type Work @default.
- W2142039290 sameAs 2142039290 @default.
- W2142039290 citedByCount "1" @default.
- W2142039290 crossrefType "proceedings-article" @default.
- W2142039290 hasAuthorship W2142039290A5000988939 @default.
- W2142039290 hasAuthorship W2142039290A5018321935 @default.
- W2142039290 hasAuthorship W2142039290A5033056137 @default.
- W2142039290 hasConcept C120665830 @default.
- W2142039290 hasConcept C121332964 @default.
- W2142039290 hasConcept C13393347 @default.
- W2142039290 hasConcept C14536661 @default.
- W2142039290 hasConcept C16389437 @default.
- W2142039290 hasConcept C168834538 @default.
- W2142039290 hasConcept C172108966 @default.
- W2142039290 hasConcept C173523689 @default.
- W2142039290 hasConcept C189166818 @default.
- W2142039290 hasConcept C197231348 @default.
- W2142039290 hasConcept C204223013 @default.
- W2142039290 hasConcept C2780117330 @default.
- W2142039290 hasConcept C49040817 @default.
- W2142039290 hasConcept C62520636 @default.
- W2142039290 hasConcept C6260449 @default.
- W2142039290 hasConcept C97355855 @default.
- W2142039290 hasConceptScore W2142039290C120665830 @default.
- W2142039290 hasConceptScore W2142039290C121332964 @default.
- W2142039290 hasConceptScore W2142039290C13393347 @default.
- W2142039290 hasConceptScore W2142039290C14536661 @default.
- W2142039290 hasConceptScore W2142039290C16389437 @default.
- W2142039290 hasConceptScore W2142039290C168834538 @default.
- W2142039290 hasConceptScore W2142039290C172108966 @default.
- W2142039290 hasConceptScore W2142039290C173523689 @default.
- W2142039290 hasConceptScore W2142039290C189166818 @default.
- W2142039290 hasConceptScore W2142039290C197231348 @default.
- W2142039290 hasConceptScore W2142039290C204223013 @default.
- W2142039290 hasConceptScore W2142039290C2780117330 @default.
- W2142039290 hasConceptScore W2142039290C49040817 @default.
- W2142039290 hasConceptScore W2142039290C62520636 @default.
- W2142039290 hasConceptScore W2142039290C6260449 @default.
- W2142039290 hasConceptScore W2142039290C97355855 @default.
- W2142039290 hasLocation W21420392901 @default.
- W2142039290 hasOpenAccess W2142039290 @default.
- W2142039290 hasPrimaryLocation W21420392901 @default.
- W2142039290 hasRelatedWork W1529821214 @default.
- W2142039290 hasRelatedWork W1991716631 @default.
- W2142039290 hasRelatedWork W2018514506 @default.
- W2142039290 hasRelatedWork W2023863764 @default.
- W2142039290 hasRelatedWork W2030441074 @default.
- W2142039290 hasRelatedWork W2121529054 @default.
- W2142039290 hasRelatedWork W2154775271 @default.
- W2142039290 hasRelatedWork W2325623077 @default.
- W2142039290 hasRelatedWork W2326306549 @default.
- W2142039290 hasRelatedWork W2499542063 @default.
- W2142039290 hasRelatedWork W2555625458 @default.
- W2142039290 hasRelatedWork W263948227 @default.
- W2142039290 hasRelatedWork W2789330675 @default.
- W2142039290 hasRelatedWork W2883181096 @default.
- W2142039290 hasRelatedWork W2884084548 @default.
- W2142039290 hasRelatedWork W2918440258 @default.
- W2142039290 hasRelatedWork W3023478926 @default.
- W2142039290 hasRelatedWork W3166366744 @default.
- W2142039290 hasRelatedWork W3191935949 @default.
- W2142039290 hasRelatedWork W3197519288 @default.
- W2142039290 isParatext "false" @default.
- W2142039290 isRetracted "false" @default.
- W2142039290 magId "2142039290" @default.
- W2142039290 workType "article" @default.