Matches in SemOpenAlex for { <https://semopenalex.org/work/W2142398047> ?p ?o ?g. }
Showing items 1 to 94 of
94
with 100 items per page.
- W2142398047 endingPage "519" @default.
- W2142398047 startingPage "511" @default.
- W2142398047 abstract "A systematic study of post-metallization annealing (PMA) effect on the quality of thermal SiO/sub 2/ on p-type 6H- and 4H-SiC has been carried out. A simultaneous quasi-static hi-lo frequency capacitance-voltage method has been employed to measure the total effective oxide charge (N/sub eff/) and interface state density (D/sub it/). To ensure accurate results, D/sub it/ was measured at 350/spl deg/C which, depending on the hole capture cross sections, should enable the measurement of interface states located in the band gap as deep as 1.3-1.5 eV from the valence band edge. The dependence of N/sub eff/ and D/sub it/ on annealing temperature and ambient as well as the effect of thermal and sputtered gate metal on the oxide quality are reported. It is shown that N/sub eff/ values close to the detection limit due to the uncertainty in SiC electron affinities and D/sub it/ values below 1/spl times/10/sup 11/ cm/sup -2//eV deep in the band gap can be reproducibly obtained for both p-type 6H- and 4H-SiC." @default.
- W2142398047 created "2016-06-24" @default.
- W2142398047 creator A5010044441 @default.
- W2142398047 creator A5032102087 @default.
- W2142398047 creator A5046268816 @default.
- W2142398047 creator A5065971756 @default.
- W2142398047 creator A5074198538 @default.
- W2142398047 date "1999-03-01" @default.
- W2142398047 modified "2023-09-26" @default.
- W2142398047 title "Study of interface state density and effective oxide charge in post-metallization annealed SiO/sub 2/-SiC structures" @default.
- W2142398047 cites W1980777096 @default.
- W2142398047 cites W2032376838 @default.
- W2142398047 cites W2051014557 @default.
- W2142398047 cites W2053390690 @default.
- W2142398047 cites W2077378866 @default.
- W2142398047 cites W2088618223 @default.
- W2142398047 cites W2092734977 @default.
- W2142398047 cites W2100419663 @default.
- W2142398047 cites W2133279204 @default.
- W2142398047 cites W2163378745 @default.
- W2142398047 doi "https://doi.org/10.1109/16.748870" @default.
- W2142398047 hasPublicationYear "1999" @default.
- W2142398047 type Work @default.
- W2142398047 sameAs 2142398047 @default.
- W2142398047 citedByCount "57" @default.
- W2142398047 countsByYear W21423980472012 @default.
- W2142398047 countsByYear W21423980472013 @default.
- W2142398047 countsByYear W21423980472014 @default.
- W2142398047 countsByYear W21423980472016 @default.
- W2142398047 countsByYear W21423980472017 @default.
- W2142398047 countsByYear W21423980472018 @default.
- W2142398047 countsByYear W21423980472019 @default.
- W2142398047 countsByYear W21423980472022 @default.
- W2142398047 crossrefType "journal-article" @default.
- W2142398047 hasAuthorship W2142398047A5010044441 @default.
- W2142398047 hasAuthorship W2142398047A5032102087 @default.
- W2142398047 hasAuthorship W2142398047A5046268816 @default.
- W2142398047 hasAuthorship W2142398047A5065971756 @default.
- W2142398047 hasAuthorship W2142398047A5074198538 @default.
- W2142398047 hasConcept C113196181 @default.
- W2142398047 hasConcept C121332964 @default.
- W2142398047 hasConcept C147789679 @default.
- W2142398047 hasConcept C159985019 @default.
- W2142398047 hasConcept C17525397 @default.
- W2142398047 hasConcept C181966813 @default.
- W2142398047 hasConcept C185592680 @default.
- W2142398047 hasConcept C191897082 @default.
- W2142398047 hasConcept C192562407 @default.
- W2142398047 hasConcept C26873012 @default.
- W2142398047 hasConcept C2777855556 @default.
- W2142398047 hasConcept C2779851234 @default.
- W2142398047 hasConcept C30066665 @default.
- W2142398047 hasConcept C43617362 @default.
- W2142398047 hasConcept C49040817 @default.
- W2142398047 hasConcept C53964469 @default.
- W2142398047 hasConcept C544153396 @default.
- W2142398047 hasConceptScore W2142398047C113196181 @default.
- W2142398047 hasConceptScore W2142398047C121332964 @default.
- W2142398047 hasConceptScore W2142398047C147789679 @default.
- W2142398047 hasConceptScore W2142398047C159985019 @default.
- W2142398047 hasConceptScore W2142398047C17525397 @default.
- W2142398047 hasConceptScore W2142398047C181966813 @default.
- W2142398047 hasConceptScore W2142398047C185592680 @default.
- W2142398047 hasConceptScore W2142398047C191897082 @default.
- W2142398047 hasConceptScore W2142398047C192562407 @default.
- W2142398047 hasConceptScore W2142398047C26873012 @default.
- W2142398047 hasConceptScore W2142398047C2777855556 @default.
- W2142398047 hasConceptScore W2142398047C2779851234 @default.
- W2142398047 hasConceptScore W2142398047C30066665 @default.
- W2142398047 hasConceptScore W2142398047C43617362 @default.
- W2142398047 hasConceptScore W2142398047C49040817 @default.
- W2142398047 hasConceptScore W2142398047C53964469 @default.
- W2142398047 hasConceptScore W2142398047C544153396 @default.
- W2142398047 hasIssue "3" @default.
- W2142398047 hasLocation W21423980471 @default.
- W2142398047 hasOpenAccess W2142398047 @default.
- W2142398047 hasPrimaryLocation W21423980471 @default.
- W2142398047 hasRelatedWork W2083173886 @default.
- W2142398047 hasRelatedWork W2134948224 @default.
- W2142398047 hasRelatedWork W2324807869 @default.
- W2142398047 hasRelatedWork W2392654749 @default.
- W2142398047 hasRelatedWork W2414885887 @default.
- W2142398047 hasRelatedWork W2558617580 @default.
- W2142398047 hasRelatedWork W2802164904 @default.
- W2142398047 hasRelatedWork W2978962404 @default.
- W2142398047 hasRelatedWork W3207734879 @default.
- W2142398047 hasRelatedWork W4205510562 @default.
- W2142398047 hasVolume "46" @default.
- W2142398047 isParatext "false" @default.
- W2142398047 isRetracted "false" @default.
- W2142398047 magId "2142398047" @default.
- W2142398047 workType "article" @default.