Matches in SemOpenAlex for { <https://semopenalex.org/work/W2142736554> ?p ?o ?g. }
- W2142736554 endingPage "569" @default.
- W2142736554 startingPage "564" @default.
- W2142736554 abstract "In this paper, we report a pH dependent study of the wet chemical etching of unintentionally doped n-type gallium nitride (GaN) layers grown on sapphire substrates. When illuminated from a 253.7-nm mercury line source, etching of GaN is found to take place in aqueous potassium hydroxide (KOH) solutions of pH values ranging from 11 to 15. The measured GaN etch rate reveals a peak value of 90 nm/min at pH=14.25 and drops rapidly on both sides of the peak position. The etch effect ceases in KOH/ethanol solutions of similar molarities. These observations are attributed to a hydration related phenomenon in which competing effects from free water molecules (H/sub 2/O)/sub f/ and hydroxyl ions (OH/sup -/) result in a peak etch rate. Our analysis indicates the slowly falling tail of the GaN etch rate in the dilute pH regime is characterized by a (H/sub 2/O)/sub f/ dominant process while the fast variation of etch rate at pH>14 is due to a competition between (H/sub 2/O)f and OH/sup -/. PACS numbers: 68.55.Jk, 73.50.Pz, 81.65.Cf, 81.65.Hq." @default.
- W2142736554 created "2016-06-24" @default.
- W2142736554 creator A5021279777 @default.
- W2142736554 creator A5040856248 @default.
- W2142736554 creator A5050343470 @default.
- W2142736554 creator A5056077728 @default.
- W2142736554 creator A5071559607 @default.
- W2142736554 creator A5090201733 @default.
- W2142736554 date "1998-01-01" @default.
- W2142736554 modified "2023-10-14" @default.
- W2142736554 title "Hydration effects in the photoassisted wet chemical etching of gallium nitride" @default.
- W2142736554 cites W1964078774 @default.
- W2142736554 cites W1965657013 @default.
- W2142736554 cites W1966968447 @default.
- W2142736554 cites W1968600102 @default.
- W2142736554 cites W1971795775 @default.
- W2142736554 cites W1976210511 @default.
- W2142736554 cites W1980387537 @default.
- W2142736554 cites W1983834680 @default.
- W2142736554 cites W1987640533 @default.
- W2142736554 cites W1988515763 @default.
- W2142736554 cites W1992908533 @default.
- W2142736554 cites W1997243304 @default.
- W2142736554 cites W2000113459 @default.
- W2142736554 cites W2005380116 @default.
- W2142736554 cites W2008974200 @default.
- W2142736554 cites W2018738886 @default.
- W2142736554 cites W2021204495 @default.
- W2142736554 cites W2039943044 @default.
- W2142736554 cites W2049461143 @default.
- W2142736554 cites W2050180897 @default.
- W2142736554 cites W2050835787 @default.
- W2142736554 cites W2051431011 @default.
- W2142736554 cites W2052618967 @default.
- W2142736554 cites W2054060833 @default.
- W2142736554 cites W2055159562 @default.
- W2142736554 cites W2055357100 @default.
- W2142736554 cites W2064738527 @default.
- W2142736554 cites W2074573335 @default.
- W2142736554 cites W2075005980 @default.
- W2142736554 cites W2076880447 @default.
- W2142736554 cites W2080144241 @default.
- W2142736554 cites W2085669729 @default.
- W2142736554 cites W2085834366 @default.
- W2142736554 cites W2086965817 @default.
- W2142736554 cites W2088452083 @default.
- W2142736554 cites W2088965878 @default.
- W2142736554 cites W2115374296 @default.
- W2142736554 cites W2141493987 @default.
- W2142736554 cites W2151258526 @default.
- W2142736554 cites W2163020341 @default.
- W2142736554 cites W4235041237 @default.
- W2142736554 cites W4242034679 @default.
- W2142736554 doi "https://doi.org/10.1109/2944.704119" @default.
- W2142736554 hasPublicationYear "1998" @default.
- W2142736554 type Work @default.
- W2142736554 sameAs 2142736554 @default.
- W2142736554 citedByCount "15" @default.
- W2142736554 countsByYear W21427365542013 @default.
- W2142736554 countsByYear W21427365542020 @default.
- W2142736554 countsByYear W21427365542023 @default.
- W2142736554 crossrefType "journal-article" @default.
- W2142736554 hasAuthorship W2142736554A5021279777 @default.
- W2142736554 hasAuthorship W2142736554A5040856248 @default.
- W2142736554 hasAuthorship W2142736554A5050343470 @default.
- W2142736554 hasAuthorship W2142736554A5056077728 @default.
- W2142736554 hasAuthorship W2142736554A5071559607 @default.
- W2142736554 hasAuthorship W2142736554A5090201733 @default.
- W2142736554 hasConcept C100460472 @default.
- W2142736554 hasConcept C113196181 @default.
- W2142736554 hasConcept C120665830 @default.
- W2142736554 hasConcept C121332964 @default.
- W2142736554 hasConcept C147789679 @default.
- W2142736554 hasConcept C171250308 @default.
- W2142736554 hasConcept C178790620 @default.
- W2142736554 hasConcept C179104552 @default.
- W2142736554 hasConcept C184651966 @default.
- W2142736554 hasConcept C185592680 @default.
- W2142736554 hasConcept C191897082 @default.
- W2142736554 hasConcept C192562407 @default.
- W2142736554 hasConcept C194760766 @default.
- W2142736554 hasConcept C2775896084 @default.
- W2142736554 hasConcept C2778871202 @default.
- W2142736554 hasConcept C2779227376 @default.
- W2142736554 hasConcept C2779439175 @default.
- W2142736554 hasConcept C2780064504 @default.
- W2142736554 hasConcept C33220542 @default.
- W2142736554 hasConcept C43617362 @default.
- W2142736554 hasConcept C49040817 @default.
- W2142736554 hasConcept C520434653 @default.
- W2142736554 hasConcept C550372918 @default.
- W2142736554 hasConcept C57863236 @default.
- W2142736554 hasConceptScore W2142736554C100460472 @default.
- W2142736554 hasConceptScore W2142736554C113196181 @default.
- W2142736554 hasConceptScore W2142736554C120665830 @default.
- W2142736554 hasConceptScore W2142736554C121332964 @default.
- W2142736554 hasConceptScore W2142736554C147789679 @default.
- W2142736554 hasConceptScore W2142736554C171250308 @default.