Matches in SemOpenAlex for { <https://semopenalex.org/work/W2143128503> ?p ?o ?g. }
Showing items 1 to 96 of
96
with 100 items per page.
- W2143128503 endingPage "G127" @default.
- W2143128503 startingPage "G127" @default.
- W2143128503 abstract "The effect of high pressure (HP) annealing and subsequent annealing, to enhance reliability, on hafnium–based high- metal oxide semiconductor field effect transistor (MOSFET) has been studied. HP hydrogen annealing effectively passivates dangling bonds which in turn reduce the interface state density. Additional annealing in nitrogen ambient reduces threshold voltage shifts due to bias temperature instability and hot carrier injection. This improvement due to subsequent annealing might be related with the annihilation of hydrogen–related trapping sites from the high- bulk. Since charge trapping is attributed mainly to dangling bonds at the interface and excess hydrogen species in the bulk of the high- oxide, by optimizing annealing conditions, both reliability and performance of high- MOSFETs are improved." @default.
- W2143128503 created "2016-06-24" @default.
- W2143128503 creator A5030911583 @default.
- W2143128503 creator A5049748104 @default.
- W2143128503 creator A5051230082 @default.
- W2143128503 creator A5054809779 @default.
- W2143128503 creator A5075701127 @default.
- W2143128503 creator A5086973050 @default.
- W2143128503 date "2006-01-01" @default.
- W2143128503 modified "2023-10-02" @default.
- W2143128503 title "Enhanced Reliability and Performance of High-k MOSFET by Two-Step Annealing" @default.
- W2143128503 cites W1485533239 @default.
- W2143128503 cites W2019017977 @default.
- W2143128503 cites W2036858306 @default.
- W2143128503 cites W2041424982 @default.
- W2143128503 cites W2110391381 @default.
- W2143128503 cites W2111854835 @default.
- W2143128503 cites W2127840831 @default.
- W2143128503 cites W2137759443 @default.
- W2143128503 cites W2482046244 @default.
- W2143128503 doi "https://doi.org/10.1149/1.2168287" @default.
- W2143128503 hasPublicationYear "2006" @default.
- W2143128503 type Work @default.
- W2143128503 sameAs 2143128503 @default.
- W2143128503 citedByCount "8" @default.
- W2143128503 countsByYear W21431285032018 @default.
- W2143128503 countsByYear W21431285032022 @default.
- W2143128503 countsByYear W21431285032023 @default.
- W2143128503 crossrefType "journal-article" @default.
- W2143128503 hasAuthorship W2143128503A5030911583 @default.
- W2143128503 hasAuthorship W2143128503A5049748104 @default.
- W2143128503 hasAuthorship W2143128503A5051230082 @default.
- W2143128503 hasAuthorship W2143128503A5054809779 @default.
- W2143128503 hasAuthorship W2143128503A5075701127 @default.
- W2143128503 hasAuthorship W2143128503A5086973050 @default.
- W2143128503 hasConcept C119599485 @default.
- W2143128503 hasConcept C127413603 @default.
- W2143128503 hasConcept C165801399 @default.
- W2143128503 hasConcept C172385210 @default.
- W2143128503 hasConcept C178790620 @default.
- W2143128503 hasConcept C185592680 @default.
- W2143128503 hasConcept C18903297 @default.
- W2143128503 hasConcept C191897082 @default.
- W2143128503 hasConcept C192562407 @default.
- W2143128503 hasConcept C195370968 @default.
- W2143128503 hasConcept C2361726 @default.
- W2143128503 hasConcept C2777855556 @default.
- W2143128503 hasConcept C2777924906 @default.
- W2143128503 hasConcept C2778413303 @default.
- W2143128503 hasConcept C2779851234 @default.
- W2143128503 hasConcept C32424582 @default.
- W2143128503 hasConcept C49040817 @default.
- W2143128503 hasConcept C512968161 @default.
- W2143128503 hasConcept C544956773 @default.
- W2143128503 hasConcept C86803240 @default.
- W2143128503 hasConceptScore W2143128503C119599485 @default.
- W2143128503 hasConceptScore W2143128503C127413603 @default.
- W2143128503 hasConceptScore W2143128503C165801399 @default.
- W2143128503 hasConceptScore W2143128503C172385210 @default.
- W2143128503 hasConceptScore W2143128503C178790620 @default.
- W2143128503 hasConceptScore W2143128503C185592680 @default.
- W2143128503 hasConceptScore W2143128503C18903297 @default.
- W2143128503 hasConceptScore W2143128503C191897082 @default.
- W2143128503 hasConceptScore W2143128503C192562407 @default.
- W2143128503 hasConceptScore W2143128503C195370968 @default.
- W2143128503 hasConceptScore W2143128503C2361726 @default.
- W2143128503 hasConceptScore W2143128503C2777855556 @default.
- W2143128503 hasConceptScore W2143128503C2777924906 @default.
- W2143128503 hasConceptScore W2143128503C2778413303 @default.
- W2143128503 hasConceptScore W2143128503C2779851234 @default.
- W2143128503 hasConceptScore W2143128503C32424582 @default.
- W2143128503 hasConceptScore W2143128503C49040817 @default.
- W2143128503 hasConceptScore W2143128503C512968161 @default.
- W2143128503 hasConceptScore W2143128503C544956773 @default.
- W2143128503 hasConceptScore W2143128503C86803240 @default.
- W2143128503 hasIssue "4" @default.
- W2143128503 hasLocation W21431285031 @default.
- W2143128503 hasOpenAccess W2143128503 @default.
- W2143128503 hasPrimaryLocation W21431285031 @default.
- W2143128503 hasRelatedWork W1581859953 @default.
- W2143128503 hasRelatedWork W1978014749 @default.
- W2143128503 hasRelatedWork W198525710 @default.
- W2143128503 hasRelatedWork W2079589266 @default.
- W2143128503 hasRelatedWork W2122365183 @default.
- W2143128503 hasRelatedWork W2130912595 @default.
- W2143128503 hasRelatedWork W2143128503 @default.
- W2143128503 hasRelatedWork W2149554966 @default.
- W2143128503 hasRelatedWork W2359388050 @default.
- W2143128503 hasRelatedWork W2501989310 @default.
- W2143128503 hasVolume "9" @default.
- W2143128503 isParatext "false" @default.
- W2143128503 isRetracted "false" @default.
- W2143128503 magId "2143128503" @default.
- W2143128503 workType "article" @default.