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• W2143157052 endingPage "1642" @default.
• W2143157052 startingPage "1635" @default.
• W2143157052 abstract "In this paper, for the hybrid orientation technology (HOT), we propose a modified amorphization/templated recrystallization (ATR) process to improve the material quality. The characterization of Si/SiO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> interface properties for complementary metal-oxide-semiconductor (CMOS) devices fabricated on HOT wafers is demonstrated through charge pumping (CP) and low-frequency (1/f) noise measurements simultaneously. For n-type metal-oxide-semiconductor field-effect transistors (nMOSFETs), devices with the increased defect-removal annealing time bring out a significant decrease in the CP current and the 1/f noise. The results indicate that ATR-induced defects are further repaired and consequently achieve a well Si/SiO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> interface. In addition, the driving current improvement is observed in devices with a small dimension utilizing the modified ATR process. For p-type MOSFETs (pMOSFETs), the direct-current characteristic, CP, and 1/f noise results are comparable between both HOT wafers. It means that the modified process would not affect bonded (110) regions and degrade the device performance. Hence, this modified process could be adopted to improve the fabrication of the CMOS on the HOT wafer using the ATR method. Moreover, the physical origins of the 1/f noise is attributed to a fluctuation in the mobility of free carriers for pMOSFETs and a unified model, incorporating both the carrier- number and correlated mobility fluctuations, for nMOSFETs." @default.
• W2143157052 created "2016-06-24" @default.
• W2143157052 creator A5035134037 @default.
• W2143157052 creator A5035501712 @default.
• W2143157052 creator A5035508811 @default.
• W2143157052 creator A5039419603 @default.
• W2143157052 creator A5048356653 @default.
• W2143157052 creator A5050869909 @default.
• W2143157052 creator A5060166814 @default.
• W2143157052 creator A5062780103 @default.
• W2143157052 date "2011-06-01" @default.
• W2143157052 modified "2023-09-28" @default.
• W2143157052 title "Characteristics of $hbox{Si/SiO}_{2}$ Interface Properties for CMOS Fabricated on Hybrid Orientation Substrate Using Amorphization/Templated Recrystallization (ATR) Method" @default.
• W2143157052 cites W1618553664 @default.
• W2143157052 cites W1980467913 @default.
• W2143157052 cites W2013972601 @default.
• W2143157052 cites W2016777194 @default.
• W2143157052 cites W2021767599 @default.
• W2143157052 cites W2035313468 @default.
• W2143157052 cites W2060655139 @default.
• W2143157052 cites W2070554262 @default.
• W2143157052 cites W2070678844 @default.
• W2143157052 cites W2078482863 @default.
• W2143157052 cites W2079232648 @default.
• W2143157052 cites W2089578219 @default.
• W2143157052 cites W2091766241 @default.
• W2143157052 cites W2096951521 @default.
• W2143157052 cites W2114697180 @default.
• W2143157052 cites W2128428769 @default.
• W2143157052 cites W2131427072 @default.
• W2143157052 cites W2131835680 @default.
• W2143157052 cites W2142423888 @default.
• W2143157052 cites W2149229127 @default.
• W2143157052 cites W2167579733 @default.
• W2143157052 cites W2543886932 @default.
• W2143157052 doi "https://doi.org/10.1109/ted.2011.2126047" @default.
• W2143157052 hasPublicationYear "2011" @default.
• W2143157052 type Work @default.
• W2143157052 sameAs 2143157052 @default.
• W2143157052 citedByCount "6" @default.
• W2143157052 countsByYear W21431570522013 @default.
• W2143157052 countsByYear W21431570522014 @default.
• W2143157052 countsByYear W21431570522015 @default.
• W2143157052 countsByYear W21431570522016 @default.
• W2143157052 crossrefType "journal-article" @default.
• W2143157052 hasAuthorship W2143157052A5035134037 @default.
• W2143157052 hasAuthorship W2143157052A5035501712 @default.
• W2143157052 hasAuthorship W2143157052A5035508811 @default.
• W2143157052 hasAuthorship W2143157052A5039419603 @default.
• W2143157052 hasAuthorship W2143157052A5048356653 @default.
• W2143157052 hasAuthorship W2143157052A5050869909 @default.
• W2143157052 hasAuthorship W2143157052A5060166814 @default.
• W2143157052 hasAuthorship W2143157052A5062780103 @default.
• W2143157052 hasConcept C119599485 @default.
• W2143157052 hasConcept C127413603 @default.
• W2143157052 hasConcept C145598152 @default.
• W2143157052 hasConcept C151730666 @default.
• W2143157052 hasConcept C159985019 @default.
• W2143157052 hasConcept C160671074 @default.
• W2143157052 hasConcept C165801399 @default.
• W2143157052 hasConcept C172385210 @default.
• W2143157052 hasConcept C192562407 @default.
• W2143157052 hasConcept C195702682 @default.
• W2143157052 hasConcept C24326235 @default.
• W2143157052 hasConcept C2777855556 @default.
• W2143157052 hasConcept C2778413303 @default.
• W2143157052 hasConcept C46362747 @default.
• W2143157052 hasConcept C49040817 @default.
• W2143157052 hasConcept C86803240 @default.
• W2143157052 hasConceptScore W2143157052C119599485 @default.
• W2143157052 hasConceptScore W2143157052C127413603 @default.
• W2143157052 hasConceptScore W2143157052C145598152 @default.
• W2143157052 hasConceptScore W2143157052C151730666 @default.
• W2143157052 hasConceptScore W2143157052C159985019 @default.
• W2143157052 hasConceptScore W2143157052C160671074 @default.
• W2143157052 hasConceptScore W2143157052C165801399 @default.
• W2143157052 hasConceptScore W2143157052C172385210 @default.
• W2143157052 hasConceptScore W2143157052C192562407 @default.
• W2143157052 hasConceptScore W2143157052C195702682 @default.
• W2143157052 hasConceptScore W2143157052C24326235 @default.
• W2143157052 hasConceptScore W2143157052C2777855556 @default.
• W2143157052 hasConceptScore W2143157052C2778413303 @default.
• W2143157052 hasConceptScore W2143157052C46362747 @default.
• W2143157052 hasConceptScore W2143157052C49040817 @default.
• W2143157052 hasConceptScore W2143157052C86803240 @default.
• W2143157052 hasIssue "6" @default.
• W2143157052 hasLocation W21431570521 @default.
• W2143157052 hasOpenAccess W2143157052 @default.
• W2143157052 hasPrimaryLocation W21431570521 @default.
• W2143157052 hasRelatedWork W1481245673 @default.
• W2143157052 hasRelatedWork W2012898807 @default.
• W2143157052 hasRelatedWork W2035490861 @default.
• W2143157052 hasRelatedWork W2084374481 @default.
• W2143157052 hasRelatedWork W2090017846 @default.
• W2143157052 hasRelatedWork W2151208572 @default.
• W2143157052 hasRelatedWork W2152216680 @default.
• W2143157052 hasRelatedWork W2167514739 @default.
• W2143157052 hasRelatedWork W2303515603 @default.

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