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• W2143399365 abstract "A compliant <i xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>XY</i> nanopositioner is presented in this brief. The device is designed to have a very low cross-coupling between the <i xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>X</i> - and <i xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>Y</i> -axis. Despite this, during high-speed raster scans, the cross-coupling effect can not be ignored. In this brief, a H <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>∞</sub> controller is designed and implemented to minimize the <i xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>X</i> -to- <;i>Y<;/i> cross-coupling of the nanoscale positioning stage, particularly at its mechanical resonance frequencies. The controller is augmented with integral action to achieve accurate tracking, as well as sufficient damping. Raster scan results over an area of 10 μm × 10 μm with small positioning errors are demonstrated. High-speed accurate raster scans of up to 100 Hz, with nanoscale resolution are also illustrated." @default.
• W2143399365 created "2016-06-24" @default.
• W2143399365 creator A5022476782 @default.
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• W2143399365 date "2010-09-01" @default.
• W2143399365 modified "2023-09-23" @default.
• W2143399365 title "Reducing Cross-Coupling in a Compliant XY Nanopositioner for Fast and Accurate Raster Scanning" @default.
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• W2143399365 doi "https://doi.org/10.1109/tcst.2009.2033201" @default.
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