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- W2143438361 abstract "Micro fabrication has been conducted for sodium potassium niobate [(K,Na)NbO 3 , KNN] thin films by dry etching and Pt/KNN/Pt unimorph micro cantilevers have been fabricated as a lead-free piezoelectric micro electro mechanical system (MEMS). KNN etching by Ar/C 4 F 8 plasma showed a high etching rate of about 60 nm/min and KNN/Cr selectivity of over 5. Tip displacement of the Pt/KNN/Pt micro cantilevers was measured and the frequency response and piezoelectric properties were evaluated. Young s modulus and piezoelectric coefficients d 31 of the KNN thin film were estimated to be 115 GPa and 99 to 219 pm/V, respectively. These results indicate that Ar/C 4 F 8 plasma etching does not degrade the piezoelectric properties of KNN thin films and enables one to fabricate various lead-free piezoelectric MEMS applications." @default.
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- W2143438361 date "2012-12-01" @default.
- W2143438361 modified "2023-09-27" @default.
- W2143438361 title "Micro fabrication of lead-free (K,Na)NbO3 piezoelectric thin films by dry etching" @default.
- W2143438361 doi "https://doi.org/10.1049/mnl.2012.0570" @default.
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