FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2143661747> ?p ?o ?g. }

• W2143661747 endingPage "175" @default.
• W2143661747 startingPage "167" @default.
• W2143661747 abstract "A silicon-based micromachined, floating-element sensor for low-magnitude wall shear-stress measurement has been developed. Sensors over a range of element sizes and sensitivities have been fabricated by thin-wafer bonding and deep-reactive ion-etching techniques. Detailed design, fabrication, and testing issues are described in this paper. Detection of the floating-element motion is accomplished using either direct or differential capacitance measurement. The design objective is to measure the shear-stress distribution at levels of O(0.10 Pa) with a spatial resolution of approximately O(100 /spl mu/m). It is assumed that the flow direction is known, permitting one to align the sensor appropriately so that a single component shear measurement is a good estimate of the prevalent shear. Using a differential capacitance detection scheme these goals have been achieved. We tested the sensor at shear levels ranging from 0 to 0.20 Pa and found that the lowest detectable shear-stress level that the sensor can measure is 0.04 Pa with an 8% uncertainty on a 200 /spl mu/m/spl times/500 /spl mu/m floating element plate." @default.
• W2143661747 created "2016-06-24" @default.
• W2143661747 creator A5030137262 @default.
• W2143661747 creator A5073295823 @default.
• W2143661747 creator A5083743347 @default.
• W2143661747 date "2005-02-01" @default.
• W2143661747 modified "2023-10-16" @default.
• W2143661747 title "A microfabricated wall shear-stress sensor with capacitative sensing" @default.
• W2143661747 cites W2003258049 @default.
• W2143661747 cites W2009786945 @default.
• W2143661747 cites W2013269727 @default.
• W2143661747 cites W2041428219 @default.
• W2143661747 cites W2041774218 @default.
• W2143661747 cites W2044580101 @default.
• W2143661747 cites W2056040992 @default.
• W2143661747 cites W2056754315 @default.
• W2143661747 cites W2069143626 @default.
• W2143661747 cites W2069214830 @default.
• W2143661747 cites W2106737203 @default.
• W2143661747 cites W2121935325 @default.
• W2143661747 cites W2149479967 @default.
• W2143661747 cites W2158931259 @default.
• W2143661747 cites W2164058139 @default.
• W2143661747 cites W2166804708 @default.
• W2143661747 cites W2168874671 @default.
• W2143661747 cites W2180399333 @default.
• W2143661747 doi "https://doi.org/10.1109/jmems.2004.839001" @default.
• W2143661747 hasPublicationYear "2005" @default.
• W2143661747 type Work @default.
• W2143661747 sameAs 2143661747 @default.
• W2143661747 citedByCount "41" @default.
• W2143661747 countsByYear W21436617472012 @default.
• W2143661747 countsByYear W21436617472013 @default.
• W2143661747 countsByYear W21436617472014 @default.
• W2143661747 countsByYear W21436617472015 @default.
• W2143661747 countsByYear W21436617472016 @default.
• W2143661747 countsByYear W21436617472017 @default.
• W2143661747 countsByYear W21436617472018 @default.
• W2143661747 countsByYear W21436617472019 @default.
• W2143661747 countsByYear W21436617472023 @default.
• W2143661747 crossrefType "journal-article" @default.
• W2143661747 hasAuthorship W2143661747A5030137262 @default.
• W2143661747 hasAuthorship W2143661747A5073295823 @default.
• W2143661747 hasAuthorship W2143661747A5083743347 @default.
• W2143661747 hasConcept C100460472 @default.
• W2143661747 hasConcept C121332964 @default.
• W2143661747 hasConcept C124634506 @default.
• W2143661747 hasConcept C130472188 @default.
• W2143661747 hasConcept C136525101 @default.
• W2143661747 hasConcept C138885662 @default.
• W2143661747 hasConcept C142724271 @default.
• W2143661747 hasConcept C147789679 @default.
• W2143661747 hasConcept C150072415 @default.
• W2143661747 hasConcept C159985019 @default.
• W2143661747 hasConcept C160671074 @default.
• W2143661747 hasConcept C17525397 @default.
• W2143661747 hasConcept C185592680 @default.
• W2143661747 hasConcept C192562407 @default.
• W2143661747 hasConcept C203455917 @default.
• W2143661747 hasConcept C204787440 @default.
• W2143661747 hasConcept C21036866 @default.
• W2143661747 hasConcept C21141959 @default.
• W2143661747 hasConcept C24890656 @default.
• W2143661747 hasConcept C2779227376 @default.
• W2143661747 hasConcept C30066665 @default.
• W2143661747 hasConcept C41895202 @default.
• W2143661747 hasConcept C49040817 @default.
• W2143661747 hasConcept C71924100 @default.
• W2143661747 hasConcept C96035792 @default.
• W2143661747 hasConceptScore W2143661747C100460472 @default.
• W2143661747 hasConceptScore W2143661747C121332964 @default.
• W2143661747 hasConceptScore W2143661747C124634506 @default.
• W2143661747 hasConceptScore W2143661747C130472188 @default.
• W2143661747 hasConceptScore W2143661747C136525101 @default.
• W2143661747 hasConceptScore W2143661747C138885662 @default.
• W2143661747 hasConceptScore W2143661747C142724271 @default.
• W2143661747 hasConceptScore W2143661747C147789679 @default.
• W2143661747 hasConceptScore W2143661747C150072415 @default.
• W2143661747 hasConceptScore W2143661747C159985019 @default.
• W2143661747 hasConceptScore W2143661747C160671074 @default.
• W2143661747 hasConceptScore W2143661747C17525397 @default.
• W2143661747 hasConceptScore W2143661747C185592680 @default.
• W2143661747 hasConceptScore W2143661747C192562407 @default.
• W2143661747 hasConceptScore W2143661747C203455917 @default.
• W2143661747 hasConceptScore W2143661747C204787440 @default.
• W2143661747 hasConceptScore W2143661747C21036866 @default.
• W2143661747 hasConceptScore W2143661747C21141959 @default.
• W2143661747 hasConceptScore W2143661747C24890656 @default.
• W2143661747 hasConceptScore W2143661747C2779227376 @default.
• W2143661747 hasConceptScore W2143661747C30066665 @default.
• W2143661747 hasConceptScore W2143661747C41895202 @default.
• W2143661747 hasConceptScore W2143661747C49040817 @default.
• W2143661747 hasConceptScore W2143661747C71924100 @default.
• W2143661747 hasConceptScore W2143661747C96035792 @default.
• W2143661747 hasIssue "1" @default.
• W2143661747 hasLocation W21436617471 @default.
• W2143661747 hasOpenAccess W2143661747 @default.
• W2143661747 hasPrimaryLocation W21436617471 @default.

• next