Matches in SemOpenAlex for { <https://semopenalex.org/work/W2144218615> ?p ?o ?g. }
Showing items 1 to 88 of
88
with 100 items per page.
- W2144218615 endingPage "1842" @default.
- W2144218615 startingPage "1836" @default.
- W2144218615 abstract "Aiming at understanding and controlling the major mechanisms and processes in microwave-generated plasmas, the ground-state densities of the most relevant atomic species and their spatial distributions were determined in these plasmas. They can be measured by optical emission and absorption spectroscopy. Similar to the determination of the silicon ground-state density from the analysis of the self-absorbed spectral lines of the silicon ground-state multiplet 3 <i xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>p</i> <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>23</sup> <i xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>P</i> -3 <i xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>p</i> 4 <i xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>s</i> <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</sup> <i xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>P</i> <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>0</sup> in the ultraviolet range at about 251 nm, the neutral concentrations of other species like carbon and titanium were evaluated from further spectroscopic analyses. Furthermore, the spatial distributions were explored in detail. New developments of microwave-generated plasma sources and their optical emission spectroscopy to investigate the kind of species in the plasmas, as well as the gas and excitation temperatures, are also presented." @default.
- W2144218615 created "2016-06-24" @default.
- W2144218615 creator A5016946854 @default.
- W2144218615 creator A5024263750 @default.
- W2144218615 creator A5028748740 @default.
- W2144218615 creator A5034704577 @default.
- W2144218615 creator A5045300700 @default.
- W2144218615 creator A5055353235 @default.
- W2144218615 creator A5057281562 @default.
- W2144218615 creator A5090713476 @default.
- W2144218615 date "2009-09-01" @default.
- W2144218615 modified "2023-10-16" @default.
- W2144218615 title "Spectroscopic Analysis of Microwave-Generated Plasmas" @default.
- W2144218615 cites W1575504573 @default.
- W2144218615 cites W1966359161 @default.
- W2144218615 cites W1995136103 @default.
- W2144218615 cites W2005633570 @default.
- W2144218615 cites W2022284405 @default.
- W2144218615 cites W2029593455 @default.
- W2144218615 cites W2030289310 @default.
- W2144218615 cites W2030484791 @default.
- W2144218615 cites W2033086210 @default.
- W2144218615 cites W2035794793 @default.
- W2144218615 cites W2036527162 @default.
- W2144218615 cites W2037078670 @default.
- W2144218615 cites W2038001118 @default.
- W2144218615 cites W2054198014 @default.
- W2144218615 cites W2067914442 @default.
- W2144218615 cites W2068270747 @default.
- W2144218615 cites W207052112 @default.
- W2144218615 cites W2108701780 @default.
- W2144218615 cites W2113783006 @default.
- W2144218615 cites W2124757131 @default.
- W2144218615 cites W2133391101 @default.
- W2144218615 cites W2141603063 @default.
- W2144218615 doi "https://doi.org/10.1109/tps.2009.2026278" @default.
- W2144218615 hasPublicationYear "2009" @default.
- W2144218615 type Work @default.
- W2144218615 sameAs 2144218615 @default.
- W2144218615 citedByCount "0" @default.
- W2144218615 crossrefType "journal-article" @default.
- W2144218615 hasAuthorship W2144218615A5016946854 @default.
- W2144218615 hasAuthorship W2144218615A5024263750 @default.
- W2144218615 hasAuthorship W2144218615A5028748740 @default.
- W2144218615 hasAuthorship W2144218615A5034704577 @default.
- W2144218615 hasAuthorship W2144218615A5045300700 @default.
- W2144218615 hasAuthorship W2144218615A5055353235 @default.
- W2144218615 hasAuthorship W2144218615A5057281562 @default.
- W2144218615 hasAuthorship W2144218615A5090713476 @default.
- W2144218615 hasConcept C113196181 @default.
- W2144218615 hasConcept C121332964 @default.
- W2144218615 hasConcept C133871045 @default.
- W2144218615 hasConcept C178790620 @default.
- W2144218615 hasConcept C184779094 @default.
- W2144218615 hasConcept C185592680 @default.
- W2144218615 hasConcept C4839761 @default.
- W2144218615 hasConcept C62520636 @default.
- W2144218615 hasConcept C69523127 @default.
- W2144218615 hasConceptScore W2144218615C113196181 @default.
- W2144218615 hasConceptScore W2144218615C121332964 @default.
- W2144218615 hasConceptScore W2144218615C133871045 @default.
- W2144218615 hasConceptScore W2144218615C178790620 @default.
- W2144218615 hasConceptScore W2144218615C184779094 @default.
- W2144218615 hasConceptScore W2144218615C185592680 @default.
- W2144218615 hasConceptScore W2144218615C4839761 @default.
- W2144218615 hasConceptScore W2144218615C62520636 @default.
- W2144218615 hasConceptScore W2144218615C69523127 @default.
- W2144218615 hasIssue "9" @default.
- W2144218615 hasLocation W21442186151 @default.
- W2144218615 hasOpenAccess W2144218615 @default.
- W2144218615 hasPrimaryLocation W21442186151 @default.
- W2144218615 hasRelatedWork W1971853108 @default.
- W2144218615 hasRelatedWork W1971906783 @default.
- W2144218615 hasRelatedWork W1999781666 @default.
- W2144218615 hasRelatedWork W2024928145 @default.
- W2144218615 hasRelatedWork W273163806 @default.
- W2144218615 hasRelatedWork W3102598223 @default.
- W2144218615 hasRelatedWork W3107414903 @default.
- W2144218615 hasRelatedWork W3197691677 @default.
- W2144218615 hasRelatedWork W4231782147 @default.
- W2144218615 hasRelatedWork W4307415736 @default.
- W2144218615 hasVolume "37" @default.
- W2144218615 isParatext "false" @default.
- W2144218615 isRetracted "false" @default.
- W2144218615 magId "2144218615" @default.
- W2144218615 workType "article" @default.