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- W2144341018 abstract "Atomic force microscopy is a powerful tool in the field of nanotechnology and nanomanipulation. By utilizing dynamics of the AFM piezo-scanner, this paper proposes an innovative imaging method to improve the imaging precision of AFM along the Z direction. Specifically, this article first introduces the common imaging method utilized among commercial AFMs, then an improved imaging method based on the piezo-scanner's dynamics is presented to remedy the fault of imprecise imaging along Z direction during high-speed scan, and some theoretical analysis is implemented to verify the validity of the method. Finally some experimental results acquired from a real-time AFM control platform are included to demonstrate the superior performance of the proposed imaging method." @default.
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- W2144341018 date "2006-07-01" @default.
- W2144341018 modified "2023-10-16" @default.
- W2144341018 title "AFM Imaging Method Based on the Analysis of Piezo-Scanner Dynamic Characteristic" @default.
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- W2144341018 doi "https://doi.org/10.1109/chicc.2006.4347416" @default.
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