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- W2144353766 abstract "The design and fabrication of an integrated circuit which is a position-sensitive detector for low-energy (typically up to 100 eV) charged particles are discussed. The device comprises a linear array of electron-sensing electrodes coupled to detection and readout circuitry in the form of amplifiers and counters all integrated onto a single CMOS chip. The chip is intended to replace existing position-sensitive detection systems in electron spectrometers.< <ETX xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>></ETX>" @default.
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- W2144353766 date "1989-06-01" @default.
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- W2144353766 title "Development of a new type of self-scanned electron image sensing integrated circuit" @default.
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- W2144353766 doi "https://doi.org/10.1109/4.32029" @default.
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