Matches in SemOpenAlex for { <https://semopenalex.org/work/W2144448590> ?p ?o ?g. }
Showing items 1 to 95 of
95
with 100 items per page.
- W2144448590 abstract "The characteristics of cell transistor with low energy junction implantation and recessed junction, which is formed by in_situ phosphorus doped selective silicon growth, are investigated. Adding the low energy n-junction implantation drastically reduces the contact resistance of pad/n-junction. And also, the drive current is improved without any degradation of BV (Breakdown Voltage) and leakage characteristics. Plasma damage free TDSE (Thermal Desorption of Silicon Etching) processing using the Cl2 gas chemistry in UHV CVD Chamber is used to control the junction depth. The recessed junction is formed with phosphorus-doped silicon using the SEG (Selective Epitaxial Growth) process and the characteristics of recessed junction are evaluated." @default.
- W2144448590 created "2016-06-24" @default.
- W2144448590 creator A5001742716 @default.
- W2144448590 creator A5007225594 @default.
- W2144448590 creator A5008772877 @default.
- W2144448590 creator A5036227552 @default.
- W2144448590 creator A5046057160 @default.
- W2144448590 creator A5077003673 @default.
- W2144448590 creator A5079873097 @default.
- W2144448590 creator A5080419921 @default.
- W2144448590 date "2002-01-01" @default.
- W2144448590 modified "2023-09-26" @default.
- W2144448590 title "Recessed junction and low energy n-junction implantation characteristics" @default.
- W2144448590 cites W1608436386 @default.
- W2144448590 cites W1966203323 @default.
- W2144448590 cites W2128093688 @default.
- W2144448590 doi "https://doi.org/10.1109/iit.2002.1257947" @default.
- W2144448590 hasPublicationYear "2002" @default.
- W2144448590 type Work @default.
- W2144448590 sameAs 2144448590 @default.
- W2144448590 citedByCount "0" @default.
- W2144448590 crossrefType "proceedings-article" @default.
- W2144448590 hasAuthorship W2144448590A5001742716 @default.
- W2144448590 hasAuthorship W2144448590A5007225594 @default.
- W2144448590 hasAuthorship W2144448590A5008772877 @default.
- W2144448590 hasAuthorship W2144448590A5036227552 @default.
- W2144448590 hasAuthorship W2144448590A5046057160 @default.
- W2144448590 hasAuthorship W2144448590A5077003673 @default.
- W2144448590 hasAuthorship W2144448590A5079873097 @default.
- W2144448590 hasAuthorship W2144448590A5080419921 @default.
- W2144448590 hasConcept C100460472 @default.
- W2144448590 hasConcept C108225325 @default.
- W2144448590 hasConcept C110738630 @default.
- W2144448590 hasConcept C113196181 @default.
- W2144448590 hasConcept C119321828 @default.
- W2144448590 hasConcept C119599485 @default.
- W2144448590 hasConcept C127413603 @default.
- W2144448590 hasConcept C165801399 @default.
- W2144448590 hasConcept C171250308 @default.
- W2144448590 hasConcept C172385210 @default.
- W2144448590 hasConcept C185592680 @default.
- W2144448590 hasConcept C192562407 @default.
- W2144448590 hasConcept C2779227376 @default.
- W2144448590 hasConcept C40786966 @default.
- W2144448590 hasConcept C43617362 @default.
- W2144448590 hasConcept C49040817 @default.
- W2144448590 hasConcept C544956773 @default.
- W2144448590 hasConcept C57863236 @default.
- W2144448590 hasConcept C62628764 @default.
- W2144448590 hasConceptScore W2144448590C100460472 @default.
- W2144448590 hasConceptScore W2144448590C108225325 @default.
- W2144448590 hasConceptScore W2144448590C110738630 @default.
- W2144448590 hasConceptScore W2144448590C113196181 @default.
- W2144448590 hasConceptScore W2144448590C119321828 @default.
- W2144448590 hasConceptScore W2144448590C119599485 @default.
- W2144448590 hasConceptScore W2144448590C127413603 @default.
- W2144448590 hasConceptScore W2144448590C165801399 @default.
- W2144448590 hasConceptScore W2144448590C171250308 @default.
- W2144448590 hasConceptScore W2144448590C172385210 @default.
- W2144448590 hasConceptScore W2144448590C185592680 @default.
- W2144448590 hasConceptScore W2144448590C192562407 @default.
- W2144448590 hasConceptScore W2144448590C2779227376 @default.
- W2144448590 hasConceptScore W2144448590C40786966 @default.
- W2144448590 hasConceptScore W2144448590C43617362 @default.
- W2144448590 hasConceptScore W2144448590C49040817 @default.
- W2144448590 hasConceptScore W2144448590C544956773 @default.
- W2144448590 hasConceptScore W2144448590C57863236 @default.
- W2144448590 hasConceptScore W2144448590C62628764 @default.
- W2144448590 hasLocation W21444485901 @default.
- W2144448590 hasOpenAccess W2144448590 @default.
- W2144448590 hasPrimaryLocation W21444485901 @default.
- W2144448590 hasRelatedWork W1680061906 @default.
- W2144448590 hasRelatedWork W1851654953 @default.
- W2144448590 hasRelatedWork W1977400064 @default.
- W2144448590 hasRelatedWork W1991937140 @default.
- W2144448590 hasRelatedWork W2000208399 @default.
- W2144448590 hasRelatedWork W2018212249 @default.
- W2144448590 hasRelatedWork W2030128404 @default.
- W2144448590 hasRelatedWork W2035398450 @default.
- W2144448590 hasRelatedWork W2046095639 @default.
- W2144448590 hasRelatedWork W2057732548 @default.
- W2144448590 hasRelatedWork W2059005924 @default.
- W2144448590 hasRelatedWork W2085582425 @default.
- W2144448590 hasRelatedWork W2096172133 @default.
- W2144448590 hasRelatedWork W2100548114 @default.
- W2144448590 hasRelatedWork W2112127758 @default.
- W2144448590 hasRelatedWork W2131410368 @default.
- W2144448590 hasRelatedWork W2137336543 @default.
- W2144448590 hasRelatedWork W2163739201 @default.
- W2144448590 hasRelatedWork W2165111236 @default.
- W2144448590 hasRelatedWork W2169745751 @default.
- W2144448590 isParatext "false" @default.
- W2144448590 isRetracted "false" @default.
- W2144448590 magId "2144448590" @default.
- W2144448590 workType "article" @default.