FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2144759212> ?p ?o ?g. }

• W2144759212 endingPage "1096" @default.
• W2144759212 startingPage "1062" @default.
• W2144759212 abstract "Radiation damage is produced in a crystalline target whenever a moving ion transfers sufficient energy to a target atom to displace it from its lattice site. For conditions of practical importance in ion implantation, the radiation damage produced by the injected ions is severe, and the crystal must be carefully Annealed if the chemical effects of the implanted ions are to dominate the residual damage. The purpose of this paper is to review work that has been performed over the past several years in an effort to understand implantation-produced damage and its annealing characteristics, especially in silicon. The subject is developed as follows. A qualitative description of the damage produced by an implanted ion is presented in Section I, followed by a partial inventory of the basic defects that are found in ion-implanted silicon (Section II). The structure of individual damage clusters produced by both heavy and light ions is then described in Section III, where theoretical predictions are compared to a variety of experimental data. This is followed with a section on the depth distribution of defects and damage clusters (Section IV); and the paper is then concluded with a section on the annealing characteristics of implantation-produced damage (Section V). The development is organized to give primary emphasis to those facts and ideas that are essential for applications of ion implantation in the fabrication of MOS and junction devices in silicon. A future paper will review the state of the art in compound semiconductors." @default.
• W2144759212 created "2016-06-24" @default.
• W2144759212 creator A5001288448 @default.
• W2144759212 date "1972-01-01" @default.
• W2144759212 modified "2023-10-13" @default.
• W2144759212 title "Ion implantation in semiconductors—Part II: Damage production and annealing" @default.
• W2144759212 cites W117168860 @default.
• W2144759212 cites W1509769202 @default.
• W2144759212 cites W1571680893 @default.
• W2144759212 cites W1963549980 @default.
• W2144759212 cites W1974031699 @default.
• W2144759212 cites W1977317172 @default.
• W2144759212 cites W1979010665 @default.
• W2144759212 cites W1999892727 @default.
• W2144759212 cites W2000487423 @default.
• W2144759212 cites W2001499804 @default.
• W2144759212 cites W2008419825 @default.
• W2144759212 cites W2016793838 @default.
• W2144759212 cites W2018241044 @default.
• W2144759212 cites W2020655357 @default.
• W2144759212 cites W2025381833 @default.
• W2144759212 cites W2026196860 @default.
• W2144759212 cites W2041856109 @default.
• W2144759212 cites W2045174718 @default.
• W2144759212 cites W2051034512 @default.
• W2144759212 cites W2060072289 @default.
• W2144759212 cites W2060468942 @default.
• W2144759212 cites W2061267700 @default.
• W2144759212 cites W2062233075 @default.
• W2144759212 cites W2065258228 @default.
• W2144759212 cites W2067372426 @default.
• W2144759212 cites W2075241850 @default.
• W2144759212 cites W2075528052 @default.
• W2144759212 cites W2086530237 @default.
• W2144759212 cites W2087332346 @default.
• W2144759212 cites W2094666186 @default.
• W2144759212 cites W2147993032 @default.
• W2144759212 cites W2160487644 @default.
• W2144759212 cites W97564084 @default.
• W2144759212 doi "https://doi.org/10.1109/proc.1972.8854" @default.
• W2144759212 hasPublicationYear "1972" @default.
• W2144759212 type Work @default.
• W2144759212 sameAs 2144759212 @default.
• W2144759212 citedByCount "674" @default.
• W2144759212 countsByYear W21447592122012 @default.
• W2144759212 countsByYear W21447592122013 @default.
• W2144759212 countsByYear W21447592122014 @default.
• W2144759212 countsByYear W21447592122015 @default.
• W2144759212 countsByYear W21447592122016 @default.
• W2144759212 countsByYear W21447592122017 @default.
• W2144759212 countsByYear W21447592122018 @default.
• W2144759212 countsByYear W21447592122019 @default.
• W2144759212 countsByYear W21447592122020 @default.
• W2144759212 countsByYear W21447592122021 @default.
• W2144759212 countsByYear W21447592122022 @default.
• W2144759212 countsByYear W21447592122023 @default.
• W2144759212 crossrefType "journal-article" @default.
• W2144759212 hasAuthorship W2144759212A5001288448 @default.
• W2144759212 hasConcept C108225325 @default.
• W2144759212 hasConcept C111337013 @default.
• W2144759212 hasConcept C121332964 @default.
• W2144759212 hasConcept C145148216 @default.
• W2144759212 hasConcept C153428861 @default.
• W2144759212 hasConcept C164675345 @default.
• W2144759212 hasConcept C171250308 @default.
• W2144759212 hasConcept C178790620 @default.
• W2144759212 hasConcept C185544564 @default.
• W2144759212 hasConcept C185592680 @default.
• W2144759212 hasConcept C191897082 @default.
• W2144759212 hasConcept C192562407 @default.
• W2144759212 hasConcept C2777855556 @default.
• W2144759212 hasConcept C2779667780 @default.
• W2144759212 hasConcept C41823505 @default.
• W2144759212 hasConcept C49040817 @default.
• W2144759212 hasConcept C544956773 @default.
• W2144759212 hasConcept C8010536 @default.
• W2144759212 hasConceptScore W2144759212C108225325 @default.
• W2144759212 hasConceptScore W2144759212C111337013 @default.
• W2144759212 hasConceptScore W2144759212C121332964 @default.
• W2144759212 hasConceptScore W2144759212C145148216 @default.
• W2144759212 hasConceptScore W2144759212C153428861 @default.
• W2144759212 hasConceptScore W2144759212C164675345 @default.
• W2144759212 hasConceptScore W2144759212C171250308 @default.
• W2144759212 hasConceptScore W2144759212C178790620 @default.
• W2144759212 hasConceptScore W2144759212C185544564 @default.
• W2144759212 hasConceptScore W2144759212C185592680 @default.
• W2144759212 hasConceptScore W2144759212C191897082 @default.
• W2144759212 hasConceptScore W2144759212C192562407 @default.
• W2144759212 hasConceptScore W2144759212C2777855556 @default.
• W2144759212 hasConceptScore W2144759212C2779667780 @default.
• W2144759212 hasConceptScore W2144759212C41823505 @default.
• W2144759212 hasConceptScore W2144759212C49040817 @default.
• W2144759212 hasConceptScore W2144759212C544956773 @default.
• W2144759212 hasConceptScore W2144759212C8010536 @default.
• W2144759212 hasIssue "9" @default.
• W2144759212 hasLocation W21447592121 @default.
• W2144759212 hasOpenAccess W2144759212 @default.
• W2144759212 hasPrimaryLocation W21447592121 @default.

• next