FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2144796207> ?p ?o ?g. }

• W2144796207 endingPage "121" @default.
• W2144796207 startingPage "111" @default.
• W2144796207 abstract "A plasma processing system for ULSI device manufacturing using energy clean technology is proposed that is capable of subtle control of ion impact energy under very low pressure and magnetron enhancement. Careful and extensive probe measurements were carried out to determine the effects of magnetic field, plasma excitation frequency, DC-biasing of plasma confining cylinder (shield), DC-biasing of electrodes and secondary RF excitation on spatial distribution of potential. It was found that the substrate DC potential can be effectively controlled by DC-biasing or RF-biasing using an external DC power source or a secondary RF excitation, respectively. As a consequence, the wafer-surface damage induced by the high energy ions can be minimized by directly controlling the potential difference between plasma and substrate. The study also found that DC-biasing of the shield is very effective in minimizing the chamber material contamination, i.e., the contamination levels of both iron and copper atoms measured by total reflection X-ray fluorescence spectroscopy.< <ETX xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>></ETX>" @default.
• W2144796207 created "2016-06-24" @default.
• W2144796207 creator A5016615919 @default.
• W2144796207 creator A5024062891 @default.
• W2144796207 creator A5030948518 @default.
• W2144796207 creator A5035466716 @default.
• W2144796207 creator A5049821896 @default.
• W2144796207 creator A5060270807 @default.
• W2144796207 creator A5062715209 @default.
• W2144796207 date "1991-05-01" @default.
• W2144796207 modified "2023-10-12" @default.
• W2144796207 title "A low damage, low contaminant plasma processing system utilizing energy clean technology" @default.
• W2144796207 cites W1969108474 @default.
• W2144796207 cites W1969707723 @default.
• W2144796207 cites W1970213721 @default.
• W2144796207 cites W1980953069 @default.
• W2144796207 cites W1983383610 @default.
• W2144796207 cites W1990163140 @default.
• W2144796207 cites W2004040724 @default.
• W2144796207 cites W2012077280 @default.
• W2144796207 cites W2017303829 @default.
• W2144796207 cites W2023603141 @default.
• W2144796207 cites W2034133325 @default.
• W2144796207 cites W2039155595 @default.
• W2144796207 cites W2043337692 @default.
• W2144796207 cites W2061814785 @default.
• W2144796207 cites W2071984008 @default.
• W2144796207 cites W2079775071 @default.
• W2144796207 cites W2088626889 @default.
• W2144796207 cites W2095156133 @default.
• W2144796207 doi "https://doi.org/10.1109/66.79723" @default.
• W2144796207 hasPublicationYear "1991" @default.
• W2144796207 type Work @default.
• W2144796207 sameAs 2144796207 @default.
• W2144796207 citedByCount "14" @default.
• W2144796207 crossrefType "journal-article" @default.
• W2144796207 hasAuthorship W2144796207A5016615919 @default.
• W2144796207 hasAuthorship W2144796207A5024062891 @default.
• W2144796207 hasAuthorship W2144796207A5030948518 @default.
• W2144796207 hasAuthorship W2144796207A5035466716 @default.
• W2144796207 hasAuthorship W2144796207A5049821896 @default.
• W2144796207 hasAuthorship W2144796207A5060270807 @default.
• W2144796207 hasAuthorship W2144796207A5062715209 @default.
• W2144796207 hasConcept C111368507 @default.
• W2144796207 hasConcept C113196181 @default.
• W2144796207 hasConcept C119599485 @default.
• W2144796207 hasConcept C121332964 @default.
• W2144796207 hasConcept C127313418 @default.
• W2144796207 hasConcept C127413603 @default.
• W2144796207 hasConcept C145148216 @default.
• W2144796207 hasConcept C160671074 @default.
• W2144796207 hasConcept C165801399 @default.
• W2144796207 hasConcept C178790620 @default.
• W2144796207 hasConcept C185592680 @default.
• W2144796207 hasConcept C192562407 @default.
• W2144796207 hasConcept C20254490 @default.
• W2144796207 hasConcept C2777289219 @default.
• W2144796207 hasConcept C43617362 @default.
• W2144796207 hasConcept C49040817 @default.
• W2144796207 hasConcept C62520636 @default.
• W2144796207 hasConcept C82706917 @default.
• W2144796207 hasConcept C88682704 @default.
• W2144796207 hasConceptScore W2144796207C111368507 @default.
• W2144796207 hasConceptScore W2144796207C113196181 @default.
• W2144796207 hasConceptScore W2144796207C119599485 @default.
• W2144796207 hasConceptScore W2144796207C121332964 @default.
• W2144796207 hasConceptScore W2144796207C127313418 @default.
• W2144796207 hasConceptScore W2144796207C127413603 @default.
• W2144796207 hasConceptScore W2144796207C145148216 @default.
• W2144796207 hasConceptScore W2144796207C160671074 @default.
• W2144796207 hasConceptScore W2144796207C165801399 @default.
• W2144796207 hasConceptScore W2144796207C178790620 @default.
• W2144796207 hasConceptScore W2144796207C185592680 @default.
• W2144796207 hasConceptScore W2144796207C192562407 @default.
• W2144796207 hasConceptScore W2144796207C20254490 @default.
• W2144796207 hasConceptScore W2144796207C2777289219 @default.
• W2144796207 hasConceptScore W2144796207C43617362 @default.
• W2144796207 hasConceptScore W2144796207C49040817 @default.
• W2144796207 hasConceptScore W2144796207C62520636 @default.
• W2144796207 hasConceptScore W2144796207C82706917 @default.
• W2144796207 hasConceptScore W2144796207C88682704 @default.
• W2144796207 hasIssue "2" @default.
• W2144796207 hasLocation W21447962071 @default.
• W2144796207 hasOpenAccess W2144796207 @default.
• W2144796207 hasPrimaryLocation W21447962071 @default.
• W2144796207 hasRelatedWork W1986839053 @default.
• W2144796207 hasRelatedWork W2010310291 @default.
• W2144796207 hasRelatedWork W2017978292 @default.
• W2144796207 hasRelatedWork W2026201889 @default.
• W2144796207 hasRelatedWork W2067457405 @default.
• W2144796207 hasRelatedWork W2095200002 @default.
• W2144796207 hasRelatedWork W2139213972 @default.
• W2144796207 hasRelatedWork W2143106578 @default.
• W2144796207 hasRelatedWork W2145279613 @default.
• W2144796207 hasRelatedWork W783523994 @default.
• W2144796207 hasVolume "4" @default.
• W2144796207 isParatext "false" @default.
• W2144796207 isRetracted "false" @default.

• next