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• W2144802562 abstract "The growth of thin films of TiO2 directly on Si surfaces is studied with Auger Electron Spectroscopy. The information from these studies about the titanium oxide properties and the changes of the electronic structure is enhanced by the use of sol-gel method for synthesizing nano-size TiO2 powder. The obtained results show that titanium oxide with higher dielectric constant and amorphous structure can be as a good gate dielectric for the future of CMOS (Complementary- Metal- Oxide- Semiconductor) devices. Key words: Thin film, nano transistor, TiO2 and sol-gel method." @default.
• W2144802562 created "2016-06-24" @default.
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• W2144802562 date "2011-08-04" @default.
• W2144802562 modified "2023-09-23" @default.
• W2144802562 title "The growth of thin Titanium oxide (TiO 2 ) film and nano size TiO 2 powder" @default.
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• W2144802562 doi "https://doi.org/10.5897/ijps10.454" @default.
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