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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2145004906> ?p ?o ?g. }

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• W2145004906 abstract "In-plane linear displacements of microelectromechanical systems are measured with subnanometer accuracy by observing the periodic micropatterns with a charge-coupled device camera attached to an optical microscope. The translation of the microstructure is retrieved from the video by phase-shift computation using discrete Fourier transform analysis. This approach is validated through measurements on silicon devices featuring steep-sided periodic microstructures. The results are consistent with the electrical readout of a bulk micromachined capacitive sensor, demonstrating the suitability of this technique for both calibration and sensing. Using a vibration isolation table, a standard deviation of σ = 0.13 nm could be achieved, enabling a measurement resolution of 0.5 nm (4σ) and a subpixel resolution better than 1/100 pixel." @default.
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• W2145004906 date "2010-10-01" @default.
• W2145004906 modified "2023-10-14" @default.
• W2145004906 title "Subnanometer Translation of Microelectromechanical Systems Measured by Discrete Fourier Analysis of CCD Images" @default.
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• W2145004906 doi "https://doi.org/10.1109/jmems.2010.2067445" @default.
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