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- W2145161253 abstract "We obtained ellipsometric data during the growth of (Al X Ga 1- X ) 0.52 In 0.48 P thin films in real time. We have developed a rotating-analyzer ellipsometer and applied it to an MBE system. It is confirmed that ellipsometry is a good system for monitoring thin film quality and that it can be used to determine the composition ratio from the optical constants of (Al X Ga 1- X ) 0.52 In 0.48 P films grown on GaAs. The thickness and optical constants of a Ga 0.52 In 0.48 P/(Al 0.4 Ga 0.6 ) 0.52 In 0.48 P superlattice structure were calculated from ellipsometric data. The average thickness of Ga 0.52 In 0.48 P multi-quantum well layers determined by ellipsometry and that determined by photoluminescence showed good agreement. From observation of the surface roughness, it is suggested that a surface roughness of about 6 monolayers was present immediately after the start of growth, and that the surface became planar with time." @default.
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- W2145161253 date "1996-09-01" @default.
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- W2145161253 title "Real-Time Ellipsometric Measurement during Growth of (Al<sub>X</sub>Ga<sub>1-X</sub>)<sub>0.52</sub>In<sub>0.48</sub>P Thin Films" @default.
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- W2145161253 doi "https://doi.org/10.1143/jjap.35.4595" @default.
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