FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2145186039> ?p ?o ?g. }

• W2145186039 endingPage "917" @default.
• W2145186039 startingPage "911" @default.
• W2145186039 abstract "Damage behavior of two different metallization systems (Ti/Al bilayer and Ta-Si-N/Cu/Ta-Si-N multilayer) as finger electrodes in surface acoustic waves (SAW) devices was investigated. A special test structure was developed for this reason. The samples were loaded with traveling SAWs varying input power and loading time. Simultaneously during these experiments, the electric behavior of the SAW structure was measured and damage development by voids and hillock formation was observed using optical microscopy, too. The damaged structures were investigated by means of different microscopy techniques. Results show that the Cu-based metallization system has a significantly higher acoustomigration resistance and power durability in comparison with the Al thin film system." @default.
• W2145186039 created "2016-06-24" @default.
• W2145186039 creator A5010329055 @default.
• W2145186039 creator A5021346548 @default.
• W2145186039 creator A5024058674 @default.
• W2145186039 creator A5035124263 @default.
• W2145186039 creator A5037245834 @default.
• W2145186039 creator A5066538752 @default.
• W2145186039 date "2005-05-01" @default.
• W2145186039 modified "2023-09-26" @default.
• W2145186039 title "Investigation of high power effects on Ti/Al and Ta-Si-N/Cu/Ta-Si-N electrodes for SAW devices" @default.
• W2145186039 cites W1500700881 @default.
• W2145186039 cites W1586535495 @default.
• W2145186039 cites W1696864670 @default.
• W2145186039 cites W1956063281 @default.
• W2145186039 cites W1973231253 @default.
• W2145186039 cites W1984554578 @default.
• W2145186039 cites W2069762110 @default.
• W2145186039 cites W2097704089 @default.
• W2145186039 cites W2101389409 @default.
• W2145186039 cites W2118895122 @default.
• W2145186039 cites W2120103344 @default.
• W2145186039 cites W2123464771 @default.
• W2145186039 cites W2128817829 @default.
• W2145186039 cites W2183439832 @default.
• W2145186039 cites W2494893422 @default.
• W2145186039 doi "https://doi.org/10.1109/tuffc.2005.1503977" @default.
• W2145186039 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/16048192" @default.
• W2145186039 hasPublicationYear "2005" @default.
• W2145186039 type Work @default.
• W2145186039 sameAs 2145186039 @default.
• W2145186039 citedByCount "20" @default.
• W2145186039 countsByYear W21451860392014 @default.
• W2145186039 countsByYear W21451860392017 @default.
• W2145186039 countsByYear W21451860392018 @default.
• W2145186039 countsByYear W21451860392019 @default.
• W2145186039 countsByYear W21451860392020 @default.
• W2145186039 crossrefType "journal-article" @default.
• W2145186039 hasAuthorship W2145186039A5010329055 @default.
• W2145186039 hasAuthorship W2145186039A5021346548 @default.
• W2145186039 hasAuthorship W2145186039A5024058674 @default.
• W2145186039 hasAuthorship W2145186039A5035124263 @default.
• W2145186039 hasAuthorship W2145186039A5037245834 @default.
• W2145186039 hasAuthorship W2145186039A5066538752 @default.
• W2145186039 hasConcept C104304963 @default.
• W2145186039 hasConcept C119599485 @default.
• W2145186039 hasConcept C120665830 @default.
• W2145186039 hasConcept C121332964 @default.
• W2145186039 hasConcept C127413603 @default.
• W2145186039 hasConcept C147080431 @default.
• W2145186039 hasConcept C147789679 @default.
• W2145186039 hasConcept C159985019 @default.
• W2145186039 hasConcept C162954803 @default.
• W2145186039 hasConcept C17525397 @default.
• W2145186039 hasConcept C185592680 @default.
• W2145186039 hasConcept C192157962 @default.
• W2145186039 hasConcept C192562407 @default.
• W2145186039 hasConcept C26771246 @default.
• W2145186039 hasConcept C2781117724 @default.
• W2145186039 hasConcept C41625074 @default.
• W2145186039 hasConcept C49040817 @default.
• W2145186039 hasConcept C54355233 @default.
• W2145186039 hasConcept C544956773 @default.
• W2145186039 hasConcept C6322943 @default.
• W2145186039 hasConcept C77017923 @default.
• W2145186039 hasConcept C86803240 @default.
• W2145186039 hasConceptScore W2145186039C104304963 @default.
• W2145186039 hasConceptScore W2145186039C119599485 @default.
• W2145186039 hasConceptScore W2145186039C120665830 @default.
• W2145186039 hasConceptScore W2145186039C121332964 @default.
• W2145186039 hasConceptScore W2145186039C127413603 @default.
• W2145186039 hasConceptScore W2145186039C147080431 @default.
• W2145186039 hasConceptScore W2145186039C147789679 @default.
• W2145186039 hasConceptScore W2145186039C159985019 @default.
• W2145186039 hasConceptScore W2145186039C162954803 @default.
• W2145186039 hasConceptScore W2145186039C17525397 @default.
• W2145186039 hasConceptScore W2145186039C185592680 @default.
• W2145186039 hasConceptScore W2145186039C192157962 @default.
• W2145186039 hasConceptScore W2145186039C192562407 @default.
• W2145186039 hasConceptScore W2145186039C26771246 @default.
• W2145186039 hasConceptScore W2145186039C2781117724 @default.
• W2145186039 hasConceptScore W2145186039C41625074 @default.
• W2145186039 hasConceptScore W2145186039C49040817 @default.
• W2145186039 hasConceptScore W2145186039C54355233 @default.
• W2145186039 hasConceptScore W2145186039C544956773 @default.
• W2145186039 hasConceptScore W2145186039C6322943 @default.
• W2145186039 hasConceptScore W2145186039C77017923 @default.
• W2145186039 hasConceptScore W2145186039C86803240 @default.
• W2145186039 hasIssue "5" @default.
• W2145186039 hasLocation W21451860391 @default.
• W2145186039 hasLocation W21451860392 @default.
• W2145186039 hasOpenAccess W2145186039 @default.
• W2145186039 hasPrimaryLocation W21451860391 @default.
• W2145186039 hasRelatedWork W1512319868 @default.
• W2145186039 hasRelatedWork W1983622139 @default.
• W2145186039 hasRelatedWork W1986979294 @default.
• W2145186039 hasRelatedWork W1994100751 @default.
• W2145186039 hasRelatedWork W1999799967 @default.

• next