Matches in SemOpenAlex for { <https://semopenalex.org/work/W2145448052> ?p ?o ?g. }
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89
with 100 items per page.
- W2145448052 endingPage "297" @default.
- W2145448052 startingPage "292" @default.
- W2145448052 abstract "Carbon doping of silicon is a subject of high interest since at high concentration (>1×1018cm−3), carbon can reduce or even suppress the undesirable diffusion of boron in silicon-based bipolar transistors. To understand this macroscopic behavior, processes of point defect interactions (i.e. between dopants, vacancies and self-interstitials) have to be analyzed. The reduction of the boron diffusion by carbon is known to be due to the creation of a self-interstitial undersaturation. In this work we discuss the influence of the oversaturation of vacancies also produced by a high carbon concentration during annealing. Experiments with a vacancy diffusing dopant, antimony, are demonstrated to prove this effect: in a carbon rich sample, the antimony diffusion is enhanced about eight times compared to samples with a much lower carbon concentration. We also investigate the carbon co-precipitation with oxygen. We explain this affinity by an exchange of point defects and a volume compensation." @default.
- W2145448052 created "2016-06-24" @default.
- W2145448052 creator A5013470345 @default.
- W2145448052 creator A5014793278 @default.
- W2145448052 creator A5018027230 @default.
- W2145448052 creator A5037631039 @default.
- W2145448052 date "2002-01-01" @default.
- W2145448052 modified "2023-10-18" @default.
- W2145448052 title "Engineering the diffusion behavior of dopants (B,Sb) in silicon by incorporation of carbon" @default.
- W2145448052 cites W1996348678 @default.
- W2145448052 cites W2009643206 @default.
- W2145448052 cites W2046554425 @default.
- W2145448052 cites W2072759348 @default.
- W2145448052 cites W2082813937 @default.
- W2145448052 cites W2102773060 @default.
- W2145448052 cites W2172197770 @default.
- W2145448052 doi "https://doi.org/10.1016/s0168-583x(01)00856-4" @default.
- W2145448052 hasPublicationYear "2002" @default.
- W2145448052 type Work @default.
- W2145448052 sameAs 2145448052 @default.
- W2145448052 citedByCount "6" @default.
- W2145448052 crossrefType "journal-article" @default.
- W2145448052 hasAuthorship W2145448052A5013470345 @default.
- W2145448052 hasAuthorship W2145448052A5014793278 @default.
- W2145448052 hasAuthorship W2145448052A5018027230 @default.
- W2145448052 hasAuthorship W2145448052A5037631039 @default.
- W2145448052 hasConcept C104779481 @default.
- W2145448052 hasConcept C114221277 @default.
- W2145448052 hasConcept C121332964 @default.
- W2145448052 hasConcept C140205800 @default.
- W2145448052 hasConcept C159467904 @default.
- W2145448052 hasConcept C159985019 @default.
- W2145448052 hasConcept C164675345 @default.
- W2145448052 hasConcept C178790620 @default.
- W2145448052 hasConcept C185592680 @default.
- W2145448052 hasConcept C191897082 @default.
- W2145448052 hasConcept C191952053 @default.
- W2145448052 hasConcept C192562407 @default.
- W2145448052 hasConcept C2777855556 @default.
- W2145448052 hasConcept C49040817 @default.
- W2145448052 hasConcept C501308230 @default.
- W2145448052 hasConcept C541565711 @default.
- W2145448052 hasConcept C544956773 @default.
- W2145448052 hasConcept C57863236 @default.
- W2145448052 hasConcept C69357855 @default.
- W2145448052 hasConcept C8010536 @default.
- W2145448052 hasConcept C97355855 @default.
- W2145448052 hasConceptScore W2145448052C104779481 @default.
- W2145448052 hasConceptScore W2145448052C114221277 @default.
- W2145448052 hasConceptScore W2145448052C121332964 @default.
- W2145448052 hasConceptScore W2145448052C140205800 @default.
- W2145448052 hasConceptScore W2145448052C159467904 @default.
- W2145448052 hasConceptScore W2145448052C159985019 @default.
- W2145448052 hasConceptScore W2145448052C164675345 @default.
- W2145448052 hasConceptScore W2145448052C178790620 @default.
- W2145448052 hasConceptScore W2145448052C185592680 @default.
- W2145448052 hasConceptScore W2145448052C191897082 @default.
- W2145448052 hasConceptScore W2145448052C191952053 @default.
- W2145448052 hasConceptScore W2145448052C192562407 @default.
- W2145448052 hasConceptScore W2145448052C2777855556 @default.
- W2145448052 hasConceptScore W2145448052C49040817 @default.
- W2145448052 hasConceptScore W2145448052C501308230 @default.
- W2145448052 hasConceptScore W2145448052C541565711 @default.
- W2145448052 hasConceptScore W2145448052C544956773 @default.
- W2145448052 hasConceptScore W2145448052C57863236 @default.
- W2145448052 hasConceptScore W2145448052C69357855 @default.
- W2145448052 hasConceptScore W2145448052C8010536 @default.
- W2145448052 hasConceptScore W2145448052C97355855 @default.
- W2145448052 hasIssue "1-4" @default.
- W2145448052 hasLocation W21454480521 @default.
- W2145448052 hasOpenAccess W2145448052 @default.
- W2145448052 hasPrimaryLocation W21454480521 @default.
- W2145448052 hasRelatedWork W2009053727 @default.
- W2145448052 hasRelatedWork W2023771957 @default.
- W2145448052 hasRelatedWork W2038758299 @default.
- W2145448052 hasRelatedWork W2042272363 @default.
- W2145448052 hasRelatedWork W2087095064 @default.
- W2145448052 hasRelatedWork W2353095148 @default.
- W2145448052 hasRelatedWork W2373921602 @default.
- W2145448052 hasRelatedWork W2422904721 @default.
- W2145448052 hasRelatedWork W2804236596 @default.
- W2145448052 hasRelatedWork W4230990471 @default.
- W2145448052 hasVolume "186" @default.
- W2145448052 isParatext "false" @default.
- W2145448052 isRetracted "false" @default.
- W2145448052 magId "2145448052" @default.
- W2145448052 workType "article" @default.