Matches in SemOpenAlex for { <https://semopenalex.org/work/W2145514882> ?p ?o ?g. }
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- W2145514882 endingPage "S108" @default.
- W2145514882 startingPage "S103" @default.
- W2145514882 abstract "Harmonic displacement of a parallel-plate electrostatic actuator up to 50% of the static pull-in displacement has been achieved despite the non-linear voltage-to-displacement function using a driving voltage with a pre-distorted waveform. The microstructure is fabricated in an epi-poly process and the circuit is implemented in a CMOS process and designed for operation of the MEMS in a frequency range up to 1 kHz. The pre-distorted waveform is synthesized using 16 samples per period with 16 non-uniformly spaced quantization levels, using a ladder with accurately scaled resistors. Harmonic actuation has been demonstrated with 34 dB reduction of second-order distortion compared to systems with sinusoidal actuation. The residual second harmonic content in the harmonic displacement is typically −42 dB." @default.
- W2145514882 created "2016-06-24" @default.
- W2145514882 creator A5019547135 @default.
- W2145514882 creator A5028889744 @default.
- W2145514882 creator A5035343917 @default.
- W2145514882 creator A5072116455 @default.
- W2145514882 creator A5072535329 @default.
- W2145514882 date "2005-06-20" @default.
- W2145514882 modified "2023-10-18" @default.
- W2145514882 title "Pre-distorted sinewave-driven parallel-plate electrostatic actuator for harmonic displacement" @default.
- W2145514882 cites W1497836116 @default.
- W2145514882 cites W1956160826 @default.
- W2145514882 cites W2001573457 @default.
- W2145514882 cites W2011952478 @default.
- W2145514882 cites W2100585207 @default.
- W2145514882 cites W2124256618 @default.
- W2145514882 cites W2155125045 @default.
- W2145514882 cites W2563505887 @default.
- W2145514882 doi "https://doi.org/10.1088/0960-1317/15/7/015" @default.
- W2145514882 hasPublicationYear "2005" @default.
- W2145514882 type Work @default.
- W2145514882 sameAs 2145514882 @default.
- W2145514882 citedByCount "1" @default.
- W2145514882 countsByYear W21455148822012 @default.
- W2145514882 crossrefType "journal-article" @default.
- W2145514882 hasAuthorship W2145514882A5019547135 @default.
- W2145514882 hasAuthorship W2145514882A5028889744 @default.
- W2145514882 hasAuthorship W2145514882A5035343917 @default.
- W2145514882 hasAuthorship W2145514882A5072116455 @default.
- W2145514882 hasAuthorship W2145514882A5072535329 @default.
- W2145514882 hasBestOaLocation W21455148822 @default.
- W2145514882 hasConcept C107551265 @default.
- W2145514882 hasConcept C11413529 @default.
- W2145514882 hasConcept C119599485 @default.
- W2145514882 hasConcept C121332964 @default.
- W2145514882 hasConcept C127413603 @default.
- W2145514882 hasConcept C127934551 @default.
- W2145514882 hasConcept C15744967 @default.
- W2145514882 hasConcept C165801399 @default.
- W2145514882 hasConcept C172707124 @default.
- W2145514882 hasConcept C192562407 @default.
- W2145514882 hasConcept C197424946 @default.
- W2145514882 hasConcept C24890656 @default.
- W2145514882 hasConcept C28855332 @default.
- W2145514882 hasConcept C33923547 @default.
- W2145514882 hasConcept C42156128 @default.
- W2145514882 hasConcept C46362747 @default.
- W2145514882 hasConcept C49040817 @default.
- W2145514882 hasConcept C542102704 @default.
- W2145514882 hasConceptScore W2145514882C107551265 @default.
- W2145514882 hasConceptScore W2145514882C11413529 @default.
- W2145514882 hasConceptScore W2145514882C119599485 @default.
- W2145514882 hasConceptScore W2145514882C121332964 @default.
- W2145514882 hasConceptScore W2145514882C127413603 @default.
- W2145514882 hasConceptScore W2145514882C127934551 @default.
- W2145514882 hasConceptScore W2145514882C15744967 @default.
- W2145514882 hasConceptScore W2145514882C165801399 @default.
- W2145514882 hasConceptScore W2145514882C172707124 @default.
- W2145514882 hasConceptScore W2145514882C192562407 @default.
- W2145514882 hasConceptScore W2145514882C197424946 @default.
- W2145514882 hasConceptScore W2145514882C24890656 @default.
- W2145514882 hasConceptScore W2145514882C28855332 @default.
- W2145514882 hasConceptScore W2145514882C33923547 @default.
- W2145514882 hasConceptScore W2145514882C42156128 @default.
- W2145514882 hasConceptScore W2145514882C46362747 @default.
- W2145514882 hasConceptScore W2145514882C49040817 @default.
- W2145514882 hasConceptScore W2145514882C542102704 @default.
- W2145514882 hasIssue "7" @default.
- W2145514882 hasLocation W21455148821 @default.
- W2145514882 hasLocation W21455148822 @default.
- W2145514882 hasOpenAccess W2145514882 @default.
- W2145514882 hasPrimaryLocation W21455148821 @default.
- W2145514882 hasRelatedWork W2008801130 @default.
- W2145514882 hasRelatedWork W2044996322 @default.
- W2145514882 hasRelatedWork W2082003234 @default.
- W2145514882 hasRelatedWork W2095710086 @default.
- W2145514882 hasRelatedWork W2151431140 @default.
- W2145514882 hasRelatedWork W2361254827 @default.
- W2145514882 hasRelatedWork W2388050386 @default.
- W2145514882 hasRelatedWork W2465374703 @default.
- W2145514882 hasRelatedWork W2967360610 @default.
- W2145514882 hasRelatedWork W2995346211 @default.
- W2145514882 hasVolume "15" @default.
- W2145514882 isParatext "false" @default.
- W2145514882 isRetracted "false" @default.
- W2145514882 magId "2145514882" @default.
- W2145514882 workType "article" @default.