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- W2145523115 abstract "sur silicium ont ete developpes grâce a l’introduction de nouvelles technologies comme le micro-usinage. Certaines realisations comme les micro-moteurs, sans trouver d’applications immediates, ont ete pionnieres dans le domaine. Les micro-miroirs, bien que developpes plus recemment, ont trouve un champ d’application plus rapidement (projection, telecommunication). Cet article presente les methodes et resultats obtenus sur ces deux exemples au sein de notre laboratoire." @default.
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- W2145523115 date "2003-01-01" @default.
- W2145523115 modified "2023-09-27" @default.
- W2145523115 title "Microsystèmes à actionnement électrostatique: conception, modélisation et caractérisation" @default.
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- W2145523115 doi "https://doi.org/10.1051/bib-j3ea:2003602" @default.
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