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- W2145697517 abstract "Plasma etch in semiconductor chip manufacturing is a complex process. The final process performance depends strongly on process parameters and their distributions at the surface of production wafers in an etch chamber. Until recently, there was no known technique that could monitor such critical parameters in-situ at the wafer surface before. In this paper the authors discuss an innovative technology where novel wireless sensor wafers (PlasmaTemptrade) are combined with advanced chamber diagnostic modeling techniques (PlasmaRxtrade) to provide a powerful solution-focused system for in-situ etch chamber component health monitoring, questionable component identification, and further corrective action" @default.
- W2145697517 created "2016-06-24" @default.
- W2145697517 creator A5018014610 @default.
- W2145697517 creator A5066957947 @default.
- W2145697517 creator A5081220797 @default.
- W2145697517 date "2006-01-01" @default.
- W2145697517 modified "2023-09-27" @default.
- W2145697517 title "Plasma Etch Process Diagnosis and Control By Wireless Sensor Wafer in Semiconductor Chip Manufacturing" @default.
- W2145697517 doi "https://doi.org/10.1109/icsict.2006.306673" @default.
- W2145697517 hasPublicationYear "2006" @default.
- W2145697517 type Work @default.
- W2145697517 sameAs 2145697517 @default.
- W2145697517 citedByCount "2" @default.
- W2145697517 countsByYear W21456975172023 @default.
- W2145697517 crossrefType "proceedings-article" @default.
- W2145697517 hasAuthorship W2145697517A5018014610 @default.
- W2145697517 hasAuthorship W2145697517A5066957947 @default.
- W2145697517 hasAuthorship W2145697517A5081220797 @default.
- W2145697517 hasConcept C100460472 @default.
- W2145697517 hasConcept C107187091 @default.
- W2145697517 hasConcept C108225325 @default.
- W2145697517 hasConcept C111919701 @default.
- W2145697517 hasConcept C119599485 @default.
- W2145697517 hasConcept C121332964 @default.
- W2145697517 hasConcept C127413603 @default.
- W2145697517 hasConcept C155386361 @default.
- W2145697517 hasConcept C160671074 @default.
- W2145697517 hasConcept C165005293 @default.
- W2145697517 hasConcept C168167062 @default.
- W2145697517 hasConcept C171250308 @default.
- W2145697517 hasConcept C192562407 @default.
- W2145697517 hasConcept C2779227376 @default.
- W2145697517 hasConcept C41008148 @default.
- W2145697517 hasConcept C49040817 @default.
- W2145697517 hasConcept C555944384 @default.
- W2145697517 hasConcept C66018809 @default.
- W2145697517 hasConcept C76155785 @default.
- W2145697517 hasConcept C97355855 @default.
- W2145697517 hasConcept C98045186 @default.
- W2145697517 hasConceptScore W2145697517C100460472 @default.
- W2145697517 hasConceptScore W2145697517C107187091 @default.
- W2145697517 hasConceptScore W2145697517C108225325 @default.
- W2145697517 hasConceptScore W2145697517C111919701 @default.
- W2145697517 hasConceptScore W2145697517C119599485 @default.
- W2145697517 hasConceptScore W2145697517C121332964 @default.
- W2145697517 hasConceptScore W2145697517C127413603 @default.
- W2145697517 hasConceptScore W2145697517C155386361 @default.
- W2145697517 hasConceptScore W2145697517C160671074 @default.
- W2145697517 hasConceptScore W2145697517C165005293 @default.
- W2145697517 hasConceptScore W2145697517C168167062 @default.
- W2145697517 hasConceptScore W2145697517C171250308 @default.
- W2145697517 hasConceptScore W2145697517C192562407 @default.
- W2145697517 hasConceptScore W2145697517C2779227376 @default.
- W2145697517 hasConceptScore W2145697517C41008148 @default.
- W2145697517 hasConceptScore W2145697517C49040817 @default.
- W2145697517 hasConceptScore W2145697517C555944384 @default.
- W2145697517 hasConceptScore W2145697517C66018809 @default.
- W2145697517 hasConceptScore W2145697517C76155785 @default.
- W2145697517 hasConceptScore W2145697517C97355855 @default.
- W2145697517 hasConceptScore W2145697517C98045186 @default.
- W2145697517 hasLocation W21456975171 @default.
- W2145697517 hasOpenAccess W2145697517 @default.
- W2145697517 hasPrimaryLocation W21456975171 @default.
- W2145697517 hasRelatedWork W1600550642 @default.
- W2145697517 hasRelatedWork W1895947839 @default.
- W2145697517 hasRelatedWork W1971751659 @default.
- W2145697517 hasRelatedWork W1994518047 @default.
- W2145697517 hasRelatedWork W1995348671 @default.
- W2145697517 hasRelatedWork W1999598569 @default.
- W2145697517 hasRelatedWork W2047766626 @default.
- W2145697517 hasRelatedWork W2062859037 @default.
- W2145697517 hasRelatedWork W2066674158 @default.
- W2145697517 hasRelatedWork W2109739407 @default.
- W2145697517 isParatext "false" @default.
- W2145697517 isRetracted "false" @default.
- W2145697517 magId "2145697517" @default.
- W2145697517 workType "article" @default.