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- W2145765510 abstract "The integration of Minienvironment and SMIF Systems into IC fabrication provides new automation requirements and design possibilities. A scenario for an optimized, integrated Minienvironment and SMIF-based Automated facility is described and the benefits are analyzed. Recent data is presented comparing particulate contamination within various conventional open and minienvironment-based facilities worldwide." @default.
- W2145765510 created "2016-06-24" @default.
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- W2145765510 date "2005-08-24" @default.
- W2145765510 modified "2023-09-26" @default.
- W2145765510 title "Minienvironment Technology And Automation Systems For Next Generation IC Fabs" @default.
- W2145765510 doi "https://doi.org/10.1109/issm.1994.729448" @default.
- W2145765510 hasPublicationYear "2005" @default.
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