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• W2146145416 abstract "The paper presents a single-crystal silicon (SCS)-based, integrated 3-axis accelerometer fabricated using a post-CMOS micromachining process. This new CMOS-MEMS process provides monolithic integration of electronics and SCS microstructures, and electrical isolation of silicon. By employing a unique vertical sensing mechanism, 3-axis acceleration sensing is achieved with a single proof mass. The symmetric structures and fully differential configuration of all the sensing electrodes can greatly reduce the cross coupling among the 3 axes. By sacrificing one interconnect metal layer, the silicon undercut of the sensing comb fingers is minimized, resulting in much higher sensitivity with the same device footprint. A wet Al etching process was also developed to remove the top Al layer without attacking the Al layers exposed from the sidewalls of the multilayer Al/oxide stacks. A two-stage, open-loop, continuous time chopper stabilized amplifier is integrated on the chip." @default.
• W2146145416 created "2016-06-24" @default.
• W2146145416 creator A5000977801 @default.
• W2146145416 creator A5026793138 @default.
• W2146145416 creator A5076719711 @default.
• W2146145416 date "2006-10-04" @default.
• W2146145416 modified "2023-09-25" @default.
• W2146145416 title "A single-crystal silicon 3-axis CMOS-MEMS accelerometer" @default.
• W2146145416 cites W2103198996 @default.
• W2146145416 cites W2106034437 @default.
• W2146145416 cites W2111516955 @default.
• W2146145416 cites W2126502502 @default.
• W2146145416 cites W2143273555 @default.
• W2146145416 cites W2158079662 @default.
• W2146145416 cites W2159318368 @default.
• W2146145416 cites W2164181849 @default.
• W2146145416 cites W2951399596 @default.
• W2146145416 cites W2283837733 @default.
• W2146145416 doi "https://doi.org/10.1109/icsens.2004.1426253" @default.
• W2146145416 hasPublicationYear "2006" @default.
• W2146145416 type Work @default.
• W2146145416 sameAs 2146145416 @default.
• W2146145416 citedByCount "21" @default.
• W2146145416 countsByYear W21461454162012 @default.
• W2146145416 countsByYear W21461454162013 @default.
• W2146145416 countsByYear W21461454162015 @default.
• W2146145416 countsByYear W21461454162019 @default.
• W2146145416 crossrefType "proceedings-article" @default.
• W2146145416 hasAuthorship W2146145416A5000977801 @default.
• W2146145416 hasAuthorship W2146145416A5026793138 @default.
• W2146145416 hasAuthorship W2146145416A5076719711 @default.
• W2146145416 hasConcept C100460472 @default.
• W2146145416 hasConcept C111919701 @default.
• W2146145416 hasConcept C119599485 @default.
• W2146145416 hasConcept C127413603 @default.
• W2146145416 hasConcept C136525101 @default.
• W2146145416 hasConcept C142724271 @default.
• W2146145416 hasConcept C145667562 @default.
• W2146145416 hasConcept C159985019 @default.
• W2146145416 hasConcept C165801399 @default.
• W2146145416 hasConcept C171250308 @default.
• W2146145416 hasConcept C192562407 @default.
• W2146145416 hasConcept C194257627 @default.
• W2146145416 hasConcept C204787440 @default.
• W2146145416 hasConcept C24326235 @default.
• W2146145416 hasConcept C2779227376 @default.
• W2146145416 hasConcept C2779292183 @default.
• W2146145416 hasConcept C2780191706 @default.
• W2146145416 hasConcept C2780330379 @default.
• W2146145416 hasConcept C37977207 @default.
• W2146145416 hasConcept C41008148 @default.
• W2146145416 hasConcept C46362747 @default.
• W2146145416 hasConcept C49040817 @default.
• W2146145416 hasConcept C544956773 @default.
• W2146145416 hasConcept C71924100 @default.
• W2146145416 hasConcept C89805583 @default.
• W2146145416 hasConceptScore W2146145416C100460472 @default.
• W2146145416 hasConceptScore W2146145416C111919701 @default.
• W2146145416 hasConceptScore W2146145416C119599485 @default.
• W2146145416 hasConceptScore W2146145416C127413603 @default.
• W2146145416 hasConceptScore W2146145416C136525101 @default.
• W2146145416 hasConceptScore W2146145416C142724271 @default.
• W2146145416 hasConceptScore W2146145416C145667562 @default.
• W2146145416 hasConceptScore W2146145416C159985019 @default.
• W2146145416 hasConceptScore W2146145416C165801399 @default.
• W2146145416 hasConceptScore W2146145416C171250308 @default.
• W2146145416 hasConceptScore W2146145416C192562407 @default.
• W2146145416 hasConceptScore W2146145416C194257627 @default.
• W2146145416 hasConceptScore W2146145416C204787440 @default.
• W2146145416 hasConceptScore W2146145416C24326235 @default.
• W2146145416 hasConceptScore W2146145416C2779227376 @default.
• W2146145416 hasConceptScore W2146145416C2779292183 @default.
• W2146145416 hasConceptScore W2146145416C2780191706 @default.
• W2146145416 hasConceptScore W2146145416C2780330379 @default.
• W2146145416 hasConceptScore W2146145416C37977207 @default.
• W2146145416 hasConceptScore W2146145416C41008148 @default.
• W2146145416 hasConceptScore W2146145416C46362747 @default.
• W2146145416 hasConceptScore W2146145416C49040817 @default.
• W2146145416 hasConceptScore W2146145416C544956773 @default.
• W2146145416 hasConceptScore W2146145416C71924100 @default.
• W2146145416 hasConceptScore W2146145416C89805583 @default.
• W2146145416 hasLocation W21461454161 @default.
• W2146145416 hasOpenAccess W2146145416 @default.
• W2146145416 hasPrimaryLocation W21461454161 @default.
• W2146145416 hasRelatedWork W1561101564 @default.
• W2146145416 hasRelatedWork W1630602315 @default.
• W2146145416 hasRelatedWork W1876453571 @default.
• W2146145416 hasRelatedWork W1963907167 @default.
• W2146145416 hasRelatedWork W1987780641 @default.
• W2146145416 hasRelatedWork W2016180229 @default.
• W2146145416 hasRelatedWork W2031424373 @default.
• W2146145416 hasRelatedWork W2055129172 @default.
• W2146145416 hasRelatedWork W2057862886 @default.
• W2146145416 hasRelatedWork W2078041188 @default.
• W2146145416 hasRelatedWork W2080737417 @default.
• W2146145416 hasRelatedWork W2088630571 @default.
• W2146145416 hasRelatedWork W2103198996 @default.
• W2146145416 hasRelatedWork W2104298187 @default.
• W2146145416 hasRelatedWork W2138918281 @default.
• W2146145416 hasRelatedWork W2149128480 @default.

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