FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2146203800> ?p ?o ?g. }

• W2146203800 abstract "The availability of defect-free mask blanks is one of the most significant challenges facing thecommercialization of extreme ultraviolet lithography (EUVL). The SEMATECH Mask Blank Development Center(MBDC) was created to drive the development of EUVL mask blanks to meet the industry's needs. EUV mask defectscome from two primary sources: the incoming mask substrate and defects added during multilayer deposition. Forincoming defects, we have both an in-house advanced cleaning capability and an advanced in situ defect smoothingcapability. This smoothing system utilizes combinations of ion beam deposition and etch to planarize any remainingincoming substrate defects. For defects added in the multilayer deposition process, we have an aggressive program tofind, identify, and eliminate the defects. This paper summarizes progress in smoothing substrate defects and eliminatingever smaller multilayer-added defects. We will show the capability of our smoothing process to planarize our existingpopulation of bump and pit type defects and discuss how quickly this can be done. We will also discuss how manydefects are added by the planarization process. In addition, we will show 54 nm sensitivity defect data for multilayer-coatedEUV mask blanks." @default.
• W2146203800 created "2016-06-24" @default.
• W2146203800 creator A5009897341 @default.
• W2146203800 creator A5022127194 @default.
• W2146203800 creator A5023194541 @default.
• W2146203800 creator A5036129952 @default.
• W2146203800 creator A5037904204 @default.
• W2146203800 creator A5046817934 @default.
• W2146203800 creator A5053863446 @default.
• W2146203800 creator A5070867291 @default.
• W2146203800 creator A5088810494 @default.
• W2146203800 date "2008-03-14" @default.
• W2146203800 modified "2023-09-26" @default.
• W2146203800 title "Ion beam deposition for defect-free EUVL mask blanks" @default.
• W2146203800 doi "https://doi.org/10.1117/12.774505" @default.
• W2146203800 hasPublicationYear "2008" @default.
• W2146203800 type Work @default.
• W2146203800 sameAs 2146203800 @default.
• W2146203800 citedByCount "4" @default.
• W2146203800 crossrefType "proceedings-article" @default.
• W2146203800 hasAuthorship W2146203800A5009897341 @default.
• W2146203800 hasAuthorship W2146203800A5022127194 @default.
• W2146203800 hasAuthorship W2146203800A5023194541 @default.
• W2146203800 hasAuthorship W2146203800A5036129952 @default.
• W2146203800 hasAuthorship W2146203800A5037904204 @default.
• W2146203800 hasAuthorship W2146203800A5046817934 @default.
• W2146203800 hasAuthorship W2146203800A5053863446 @default.
• W2146203800 hasAuthorship W2146203800A5070867291 @default.
• W2146203800 hasAuthorship W2146203800A5088810494 @default.
• W2146203800 hasConcept C105487726 @default.
• W2146203800 hasConcept C111368507 @default.
• W2146203800 hasConcept C120665830 @default.
• W2146203800 hasConcept C121332964 @default.
• W2146203800 hasConcept C127313418 @default.
• W2146203800 hasConcept C138113353 @default.
• W2146203800 hasConcept C146024833 @default.
• W2146203800 hasConcept C151730666 @default.
• W2146203800 hasConcept C159985019 @default.
• W2146203800 hasConcept C162996421 @default.
• W2146203800 hasConcept C171250308 @default.
• W2146203800 hasConcept C180088628 @default.
• W2146203800 hasConcept C192562407 @default.
• W2146203800 hasConcept C204223013 @default.
• W2146203800 hasConcept C2777289219 @default.
• W2146203800 hasConcept C2778089247 @default.
• W2146203800 hasConcept C2779227376 @default.
• W2146203800 hasConcept C2816523 @default.
• W2146203800 hasConcept C49040817 @default.
• W2146203800 hasConcept C520434653 @default.
• W2146203800 hasConcept C53524968 @default.
• W2146203800 hasConcept C64297162 @default.
• W2146203800 hasConcept C86803240 @default.
• W2146203800 hasConceptScore W2146203800C105487726 @default.
• W2146203800 hasConceptScore W2146203800C111368507 @default.
• W2146203800 hasConceptScore W2146203800C120665830 @default.
• W2146203800 hasConceptScore W2146203800C121332964 @default.
• W2146203800 hasConceptScore W2146203800C127313418 @default.
• W2146203800 hasConceptScore W2146203800C138113353 @default.
• W2146203800 hasConceptScore W2146203800C146024833 @default.
• W2146203800 hasConceptScore W2146203800C151730666 @default.
• W2146203800 hasConceptScore W2146203800C159985019 @default.
• W2146203800 hasConceptScore W2146203800C162996421 @default.
• W2146203800 hasConceptScore W2146203800C171250308 @default.
• W2146203800 hasConceptScore W2146203800C180088628 @default.
• W2146203800 hasConceptScore W2146203800C192562407 @default.
• W2146203800 hasConceptScore W2146203800C204223013 @default.
• W2146203800 hasConceptScore W2146203800C2777289219 @default.
• W2146203800 hasConceptScore W2146203800C2778089247 @default.
• W2146203800 hasConceptScore W2146203800C2779227376 @default.
• W2146203800 hasConceptScore W2146203800C2816523 @default.
• W2146203800 hasConceptScore W2146203800C49040817 @default.
• W2146203800 hasConceptScore W2146203800C520434653 @default.
• W2146203800 hasConceptScore W2146203800C53524968 @default.
• W2146203800 hasConceptScore W2146203800C64297162 @default.
• W2146203800 hasConceptScore W2146203800C86803240 @default.
• W2146203800 hasLocation W21462038001 @default.
• W2146203800 hasOpenAccess W2146203800 @default.
• W2146203800 hasPrimaryLocation W21462038001 @default.
• W2146203800 hasRelatedWork W1973457435 @default.
• W2146203800 hasRelatedWork W2005225520 @default.
• W2146203800 hasRelatedWork W2012581599 @default.
• W2146203800 hasRelatedWork W2014642403 @default.
• W2146203800 hasRelatedWork W2030290602 @default.
• W2146203800 hasRelatedWork W2034626725 @default.
• W2146203800 hasRelatedWork W2049039277 @default.
• W2146203800 hasRelatedWork W2058039293 @default.
• W2146203800 hasRelatedWork W2063627215 @default.
• W2146203800 hasRelatedWork W2068938375 @default.
• W2146203800 hasRelatedWork W2081941255 @default.
• W2146203800 hasRelatedWork W2113646273 @default.
• W2146203800 hasRelatedWork W2120708188 @default.
• W2146203800 hasRelatedWork W2163306688 @default.
• W2146203800 hasRelatedWork W2375412156 @default.
• W2146203800 hasRelatedWork W1494345580 @default.
• W2146203800 hasRelatedWork W2769182327 @default.
• W2146203800 hasRelatedWork W2931982827 @default.
• W2146203800 hasRelatedWork W3211558543 @default.
• W2146203800 hasRelatedWork W3211987244 @default.
• W2146203800 isParatext "false" @default.
• W2146203800 isRetracted "false" @default.

• next