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• W2146273410 endingPage "2532" @default.
• W2146273410 startingPage "2522" @default.
• W2146273410 abstract "We have investigated plasma-induced damage of the inductively coupled plasma (ICP) etched surface of n-type GaN using Cl2/BCl3 chemistry. The surface morphology of the etched GaN under different plasma conditions is analyzed by atomic force microscopy. X-ray photoelectron spectroscopy is used to correlate the chemical changes induced by plasma etching of the GaN surface. We have carried out photoluminescence measurements of etched GaN surfaces subjected to varying ICP conditions. The intensity of the band-edge and yellow luminescence transitions was used to evaluate the damage introduced into the semiconductor during dry etching." @default.
• W2146273410 created "2016-06-24" @default.
• W2146273410 creator A5042868954 @default.
• W2146273410 creator A5055567718 @default.
• W2146273410 creator A5058783446 @default.
• W2146273410 creator A5060209002 @default.
• W2146273410 creator A5088653808 @default.
• W2146273410 date "2001-09-01" @default.
• W2146273410 modified "2023-10-18" @default.
• W2146273410 title "Characterization of inductively coupled plasma etched surface of GaN using Cl2/BCl3 chemistry" @default.
• W2146273410 cites W1486830176 @default.
• W2146273410 cites W1526532500 @default.
• W2146273410 cites W1800838859 @default.
• W2146273410 cites W1963980063 @default.
• W2146273410 cites W1971226789 @default.
• W2146273410 cites W1974011962 @default.
• W2146273410 cites W1982425962 @default.
• W2146273410 cites W1984369799 @default.
• W2146273410 cites W1984515736 @default.
• W2146273410 cites W1994760817 @default.
• W2146273410 cites W1999121757 @default.
• W2146273410 cites W2002862401 @default.
• W2146273410 cites W2005063799 @default.
• W2146273410 cites W2005627880 @default.
• W2146273410 cites W2009891531 @default.
• W2146273410 cites W2011753375 @default.
• W2146273410 cites W2023142060 @default.
• W2146273410 cites W2024912525 @default.
• W2146273410 cites W2029814227 @default.
• W2146273410 cites W2031829617 @default.
• W2146273410 cites W2035334719 @default.
• W2146273410 cites W2044765535 @default.
• W2146273410 cites W2055615025 @default.
• W2146273410 cites W2062384588 @default.
• W2146273410 cites W2081117336 @default.
• W2146273410 cites W2087116976 @default.
• W2146273410 cites W2091805561 @default.
• W2146273410 cites W2127848248 @default.
• W2146273410 cites W2129927039 @default.
• W2146273410 cites W2137632715 @default.
• W2146273410 cites W2147739520 @default.
• W2146273410 cites W2153063279 @default.
• W2146273410 cites W2199359159 @default.
• W2146273410 cites W2322854229 @default.
• W2146273410 cites W2323207587 @default.
• W2146273410 doi "https://doi.org/10.1116/1.1392400" @default.
• W2146273410 hasPublicationYear "2001" @default.
• W2146273410 type Work @default.
• W2146273410 sameAs 2146273410 @default.
• W2146273410 citedByCount "48" @default.
• W2146273410 countsByYear W21462734102012 @default.
• W2146273410 countsByYear W21462734102014 @default.
• W2146273410 countsByYear W21462734102015 @default.
• W2146273410 countsByYear W21462734102016 @default.
• W2146273410 countsByYear W21462734102017 @default.
• W2146273410 countsByYear W21462734102018 @default.
• W2146273410 countsByYear W21462734102019 @default.
• W2146273410 countsByYear W21462734102020 @default.
• W2146273410 countsByYear W21462734102021 @default.
• W2146273410 countsByYear W21462734102022 @default.
• W2146273410 countsByYear W21462734102023 @default.
• W2146273410 crossrefType "journal-article" @default.
• W2146273410 hasAuthorship W2146273410A5042868954 @default.
• W2146273410 hasAuthorship W2146273410A5055567718 @default.
• W2146273410 hasAuthorship W2146273410A5058783446 @default.
• W2146273410 hasAuthorship W2146273410A5060209002 @default.
• W2146273410 hasAuthorship W2146273410A5088653808 @default.
• W2146273410 hasConcept C100460472 @default.
• W2146273410 hasConcept C107187091 @default.
• W2146273410 hasConcept C107872376 @default.
• W2146273410 hasConcept C108225325 @default.
• W2146273410 hasConcept C113196181 @default.
• W2146273410 hasConcept C121332964 @default.
• W2146273410 hasConcept C127413603 @default.
• W2146273410 hasConcept C1291036 @default.
• W2146273410 hasConcept C148869448 @default.
• W2146273410 hasConcept C171250308 @default.
• W2146273410 hasConcept C175708663 @default.
• W2146273410 hasConcept C185592680 @default.
• W2146273410 hasConcept C192562407 @default.
• W2146273410 hasConcept C2779227376 @default.
• W2146273410 hasConcept C2780841128 @default.
• W2146273410 hasConcept C32891209 @default.
• W2146273410 hasConcept C42360764 @default.
• W2146273410 hasConcept C49040817 @default.
• W2146273410 hasConcept C62520636 @default.
• W2146273410 hasConcept C82706917 @default.
• W2146273410 hasConcept C85080765 @default.
• W2146273410 hasConcept C95974651 @default.
• W2146273410 hasConceptScore W2146273410C100460472 @default.
• W2146273410 hasConceptScore W2146273410C107187091 @default.
• W2146273410 hasConceptScore W2146273410C107872376 @default.
• W2146273410 hasConceptScore W2146273410C108225325 @default.
• W2146273410 hasConceptScore W2146273410C113196181 @default.
• W2146273410 hasConceptScore W2146273410C121332964 @default.
• W2146273410 hasConceptScore W2146273410C127413603 @default.
• W2146273410 hasConceptScore W2146273410C1291036 @default.
• W2146273410 hasConceptScore W2146273410C148869448 @default.

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