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• W2146364524 abstract "With shrinking feature sizes and error budgets in OPC models, effective pattern coverage and accurate measurement become more and more challenging. The goal of pattern selection is to maximize the efficiency of gauges used in model calibration. By optimizing sample plan for model calibration, we can reduce the metrology requirement and modeling turn-around time, without sacrificing the model accuracy and stability. With the Tachyon pattern-selection-tool, we seek to parameterize the patterns, by assessing dominant characteristics of the surroundings of the point of interest. This allows us to represent each pattern with one vector in a finite-dimensional space, and the entire patterns pool with a set of vectors. A reduced but representative set of patterns can then be automatically selected from the original full set sample data, based on certain coverage criteria. In this paper, we prove that the model built with 56% reduced wafer data could achieve comparable quality as the model built with full set data." @default.
• W2146364524 created "2016-06-24" @default.
• W2146364524 creator A5000795174 @default.
• W2146364524 creator A5003554962 @default.
• W2146364524 creator A5005542354 @default.
• W2146364524 creator A5019338559 @default.
• W2146364524 creator A5020005002 @default.
• W2146364524 creator A5051147595 @default.
• W2146364524 creator A5052893504 @default.
• W2146364524 creator A5055005905 @default.
• W2146364524 creator A5055479108 @default.
• W2146364524 creator A5056366655 @default.
• W2146364524 creator A5058941832 @default.
• W2146364524 creator A5074951825 @default.
• W2146364524 creator A5087434647 @default.
• W2146364524 creator A5091201956 @default.
• W2146364524 date "2011-03-17" @default.
• W2146364524 modified "2023-09-26" @default.
• W2146364524 title "Optimizing OPC data sampling based on orthogonal vector space" @default.
• W2146364524 cites W1970999392 @default.
• W2146364524 cites W2030907697 @default.
• W2146364524 cites W2044209572 @default.
• W2146364524 cites W2089672739 @default.
• W2146364524 cites W1608223761 @default.
• W2146364524 doi "https://doi.org/10.1117/12.881575" @default.
• W2146364524 hasPublicationYear "2011" @default.
• W2146364524 type Work @default.
• W2146364524 sameAs 2146364524 @default.
• W2146364524 citedByCount "11" @default.
• W2146364524 countsByYear W21463645242012 @default.
• W2146364524 countsByYear W21463645242014 @default.
• W2146364524 countsByYear W21463645242015 @default.
• W2146364524 countsByYear W21463645242016 @default.
• W2146364524 countsByYear W21463645242017 @default.
• W2146364524 countsByYear W21463645242018 @default.
• W2146364524 crossrefType "proceedings-article" @default.
• W2146364524 hasAuthorship W2146364524A5000795174 @default.
• W2146364524 hasAuthorship W2146364524A5003554962 @default.
• W2146364524 hasAuthorship W2146364524A5005542354 @default.
• W2146364524 hasAuthorship W2146364524A5019338559 @default.
• W2146364524 hasAuthorship W2146364524A5020005002 @default.
• W2146364524 hasAuthorship W2146364524A5051147595 @default.
• W2146364524 hasAuthorship W2146364524A5052893504 @default.
• W2146364524 hasAuthorship W2146364524A5055005905 @default.
• W2146364524 hasAuthorship W2146364524A5055479108 @default.
• W2146364524 hasAuthorship W2146364524A5056366655 @default.
• W2146364524 hasAuthorship W2146364524A5058941832 @default.
• W2146364524 hasAuthorship W2146364524A5074951825 @default.
• W2146364524 hasAuthorship W2146364524A5087434647 @default.
• W2146364524 hasAuthorship W2146364524A5091201956 @default.
• W2146364524 hasConcept C105795698 @default.
• W2146364524 hasConcept C106131492 @default.
• W2146364524 hasConcept C112972136 @default.
• W2146364524 hasConcept C11413529 @default.
• W2146364524 hasConcept C119857082 @default.
• W2146364524 hasConcept C124101348 @default.
• W2146364524 hasConcept C140779682 @default.
• W2146364524 hasConcept C153180895 @default.
• W2146364524 hasConcept C154945302 @default.
• W2146364524 hasConcept C165838908 @default.
• W2146364524 hasConcept C177264268 @default.
• W2146364524 hasConcept C185592680 @default.
• W2146364524 hasConcept C198531522 @default.
• W2146364524 hasConcept C199360897 @default.
• W2146364524 hasConcept C31972630 @default.
• W2146364524 hasConcept C33923547 @default.
• W2146364524 hasConcept C41008148 @default.
• W2146364524 hasConcept C43617362 @default.
• W2146364524 hasConcept C58489278 @default.
• W2146364524 hasConcept C67186912 @default.
• W2146364524 hasConcept C77088390 @default.
• W2146364524 hasConcept C83665646 @default.
• W2146364524 hasConceptScore W2146364524C105795698 @default.
• W2146364524 hasConceptScore W2146364524C106131492 @default.
• W2146364524 hasConceptScore W2146364524C112972136 @default.
• W2146364524 hasConceptScore W2146364524C11413529 @default.
• W2146364524 hasConceptScore W2146364524C119857082 @default.
• W2146364524 hasConceptScore W2146364524C124101348 @default.
• W2146364524 hasConceptScore W2146364524C140779682 @default.
• W2146364524 hasConceptScore W2146364524C153180895 @default.
• W2146364524 hasConceptScore W2146364524C154945302 @default.
• W2146364524 hasConceptScore W2146364524C165838908 @default.
• W2146364524 hasConceptScore W2146364524C177264268 @default.
• W2146364524 hasConceptScore W2146364524C185592680 @default.
• W2146364524 hasConceptScore W2146364524C198531522 @default.
• W2146364524 hasConceptScore W2146364524C199360897 @default.
• W2146364524 hasConceptScore W2146364524C31972630 @default.
• W2146364524 hasConceptScore W2146364524C33923547 @default.
• W2146364524 hasConceptScore W2146364524C41008148 @default.
• W2146364524 hasConceptScore W2146364524C43617362 @default.
• W2146364524 hasConceptScore W2146364524C58489278 @default.
• W2146364524 hasConceptScore W2146364524C67186912 @default.
• W2146364524 hasConceptScore W2146364524C77088390 @default.
• W2146364524 hasConceptScore W2146364524C83665646 @default.
• W2146364524 hasLocation W21463645241 @default.
• W2146364524 hasOpenAccess W2146364524 @default.
• W2146364524 hasPrimaryLocation W21463645241 @default.
• W2146364524 hasRelatedWork W2046562920 @default.
• W2146364524 hasRelatedWork W2078736197 @default.
• W2146364524 hasRelatedWork W2098215860 @default.

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