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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2146406789> ?p ?o ?g. }

• W2146406789 endingPage "101" @default.
• W2146406789 startingPage "87" @default.
• W2146406789 abstract "A reduced-order model describing a rapid thermal chemical vapor deposition (RTCVD) process is utilized for real-time model based control for temperature uniformity across the wafer. Feedback is based on temperature measurements at selected points on the wafer surface. The feedback controller is designed using the internal model control (IMC) structure, especially modified to handle systems described by ordinary differential and algebraic equations. The IMC controller is obtained using optimal control theory on singular arcs extended for multi-input systems. Its performance is also compared with one based on the Hirschorn inverse of the model. The proposed scheme is tested with extensive simulations where the full-order model is used to emulate the process. Several cases of significant uncertainty, including model parameter errors, process disturbances, actuator errors, and measurement noise are used to test the robustness of the controller to real life situations. Both controllers succeed in achieving temperature uniformity well within the desirable bounds, even in cases where several sources of uncertainty are simultaneously present with measurement noise." @default.
• W2146406789 created "2016-06-24" @default.
• W2146406789 creator A5027435359 @default.
• W2146406789 creator A5042591534 @default.
• W2146406789 creator A5073681453 @default.
• W2146406789 date "1999-01-01" @default.
• W2146406789 modified "2023-09-26" @default.
• W2146406789 title "Inverse model-based real-time control for temperature uniformity of RTCVD" @default.
• W2146406789 cites W1662814902 @default.
• W2146406789 cites W1968381023 @default.
• W2146406789 cites W2001676158 @default.
• W2146406789 cites W2046935643 @default.
• W2146406789 cites W2057264191 @default.
• W2146406789 cites W2064411125 @default.
• W2146406789 cites W2074194902 @default.
• W2146406789 cites W2077380714 @default.
• W2146406789 cites W2094238924 @default.
• W2146406789 cites W2110170047 @default.
• W2146406789 cites W2120818273 @default.
• W2146406789 cites W2139433552 @default.
• W2146406789 cites W2159602230 @default.
• W2146406789 cites W4232227946 @default.
• W2146406789 doi "https://doi.org/10.1109/66.744530" @default.
• W2146406789 hasPublicationYear "1999" @default.
• W2146406789 type Work @default.
• W2146406789 sameAs 2146406789 @default.
• W2146406789 citedByCount "42" @default.
• W2146406789 countsByYear W21464067892013 @default.
• W2146406789 countsByYear W21464067892014 @default.
• W2146406789 countsByYear W21464067892017 @default.
• W2146406789 countsByYear W21464067892019 @default.
• W2146406789 countsByYear W21464067892023 @default.
• W2146406789 crossrefType "journal-article" @default.
• W2146406789 hasAuthorship W2146406789A5027435359 @default.
• W2146406789 hasAuthorship W2146406789A5042591534 @default.
• W2146406789 hasAuthorship W2146406789A5073681453 @default.
• W2146406789 hasConcept C104317684 @default.
• W2146406789 hasConcept C111919701 @default.
• W2146406789 hasConcept C119599485 @default.
• W2146406789 hasConcept C127413603 @default.
• W2146406789 hasConcept C133731056 @default.
• W2146406789 hasConcept C154945302 @default.
• W2146406789 hasConcept C155386361 @default.
• W2146406789 hasConcept C172707124 @default.
• W2146406789 hasConcept C17500928 @default.
• W2146406789 hasConcept C185592680 @default.
• W2146406789 hasConcept C203479927 @default.
• W2146406789 hasConcept C207467116 @default.
• W2146406789 hasConcept C24326235 @default.
• W2146406789 hasConcept C2524010 @default.
• W2146406789 hasConcept C2775924081 @default.
• W2146406789 hasConcept C28427503 @default.
• W2146406789 hasConcept C31531917 @default.
• W2146406789 hasConcept C33923547 @default.
• W2146406789 hasConcept C41008148 @default.
• W2146406789 hasConcept C47446073 @default.
• W2146406789 hasConcept C536315585 @default.
• W2146406789 hasConcept C55493867 @default.
• W2146406789 hasConcept C63479239 @default.
• W2146406789 hasConcept C6557445 @default.
• W2146406789 hasConcept C86803240 @default.
• W2146406789 hasConcept C98045186 @default.
• W2146406789 hasConceptScore W2146406789C104317684 @default.
• W2146406789 hasConceptScore W2146406789C111919701 @default.
• W2146406789 hasConceptScore W2146406789C119599485 @default.
• W2146406789 hasConceptScore W2146406789C127413603 @default.
• W2146406789 hasConceptScore W2146406789C133731056 @default.
• W2146406789 hasConceptScore W2146406789C154945302 @default.
• W2146406789 hasConceptScore W2146406789C155386361 @default.
• W2146406789 hasConceptScore W2146406789C172707124 @default.
• W2146406789 hasConceptScore W2146406789C17500928 @default.
• W2146406789 hasConceptScore W2146406789C185592680 @default.
• W2146406789 hasConceptScore W2146406789C203479927 @default.
• W2146406789 hasConceptScore W2146406789C207467116 @default.
• W2146406789 hasConceptScore W2146406789C24326235 @default.
• W2146406789 hasConceptScore W2146406789C2524010 @default.
• W2146406789 hasConceptScore W2146406789C2775924081 @default.
• W2146406789 hasConceptScore W2146406789C28427503 @default.
• W2146406789 hasConceptScore W2146406789C31531917 @default.
• W2146406789 hasConceptScore W2146406789C33923547 @default.
• W2146406789 hasConceptScore W2146406789C41008148 @default.
• W2146406789 hasConceptScore W2146406789C47446073 @default.
• W2146406789 hasConceptScore W2146406789C536315585 @default.
• W2146406789 hasConceptScore W2146406789C55493867 @default.
• W2146406789 hasConceptScore W2146406789C63479239 @default.
• W2146406789 hasConceptScore W2146406789C6557445 @default.
• W2146406789 hasConceptScore W2146406789C86803240 @default.
• W2146406789 hasConceptScore W2146406789C98045186 @default.
• W2146406789 hasIssue "1" @default.
• W2146406789 hasLocation W21464067891 @default.
• W2146406789 hasOpenAccess W2146406789 @default.
• W2146406789 hasPrimaryLocation W21464067891 @default.
• W2146406789 hasRelatedWork W1086532838 @default.
• W2146406789 hasRelatedWork W1984717187 @default.
• W2146406789 hasRelatedWork W1987367229 @default.
• W2146406789 hasRelatedWork W2020830918 @default.
• W2146406789 hasRelatedWork W2090848200 @default.
• W2146406789 hasRelatedWork W2119611887 @default.

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