Matches in SemOpenAlex for { <https://semopenalex.org/work/W2146408065> ?p ?o ?g. }
Showing items 1 to 100 of
100
with 100 items per page.
- W2146408065 abstract "This paper reports a new symmetrical beam-mass structure for sandwich capacitive accelerometers. The single-wafer fabrication of the symmetrical double-sided beam-mass structure in which eight straight beams are connected to the corners of the proof mass is accomplished only by anisotropic wet etching of a (100) wafer without convex corner compensation. Different measuring-range accelerometers can be got by controlling the thickness of the spring beam. A packaged sensor with 140 mum beam thickness is measured by a dropping hammer system. The sensitivity is 58 muV/g for a 5000 g shock acceleration under 5 V power supply." @default.
- W2146408065 created "2016-06-24" @default.
- W2146408065 creator A5020280286 @default.
- W2146408065 creator A5052817162 @default.
- W2146408065 creator A5076340018 @default.
- W2146408065 creator A5077588162 @default.
- W2146408065 creator A5089701646 @default.
- W2146408065 date "2008-01-01" @default.
- W2146408065 modified "2023-10-14" @default.
- W2146408065 title "A new symmetrical beam-mass structure for accelerometers by anisotropic etching without convex corner compensation" @default.
- W2146408065 cites W2020307756 @default.
- W2146408065 cites W2090524419 @default.
- W2146408065 cites W2147705630 @default.
- W2146408065 cites W2149128480 @default.
- W2146408065 doi "https://doi.org/10.1109/nems.2008.4484501" @default.
- W2146408065 hasPublicationYear "2008" @default.
- W2146408065 type Work @default.
- W2146408065 sameAs 2146408065 @default.
- W2146408065 citedByCount "2" @default.
- W2146408065 countsByYear W21464080652012 @default.
- W2146408065 countsByYear W21464080652019 @default.
- W2146408065 crossrefType "proceedings-article" @default.
- W2146408065 hasAuthorship W2146408065A5020280286 @default.
- W2146408065 hasAuthorship W2146408065A5052817162 @default.
- W2146408065 hasAuthorship W2146408065A5076340018 @default.
- W2146408065 hasAuthorship W2146408065A5077588162 @default.
- W2146408065 hasAuthorship W2146408065A5089701646 @default.
- W2146408065 hasConcept C100460472 @default.
- W2146408065 hasConcept C117896860 @default.
- W2146408065 hasConcept C119440689 @default.
- W2146408065 hasConcept C119599485 @default.
- W2146408065 hasConcept C120665830 @default.
- W2146408065 hasConcept C121332964 @default.
- W2146408065 hasConcept C127413603 @default.
- W2146408065 hasConcept C136525101 @default.
- W2146408065 hasConcept C13655849 @default.
- W2146408065 hasConcept C142724271 @default.
- W2146408065 hasConcept C159985019 @default.
- W2146408065 hasConcept C160671074 @default.
- W2146408065 hasConcept C168834538 @default.
- W2146408065 hasConcept C191897082 @default.
- W2146408065 hasConcept C192562407 @default.
- W2146408065 hasConcept C204787440 @default.
- W2146408065 hasConcept C206755178 @default.
- W2146408065 hasConcept C24890656 @default.
- W2146408065 hasConcept C2779227376 @default.
- W2146408065 hasConcept C2780330379 @default.
- W2146408065 hasConcept C2984025587 @default.
- W2146408065 hasConcept C37977207 @default.
- W2146408065 hasConcept C49040817 @default.
- W2146408065 hasConcept C520434653 @default.
- W2146408065 hasConcept C62520636 @default.
- W2146408065 hasConcept C71924100 @default.
- W2146408065 hasConcept C74650414 @default.
- W2146408065 hasConcept C89805583 @default.
- W2146408065 hasConceptScore W2146408065C100460472 @default.
- W2146408065 hasConceptScore W2146408065C117896860 @default.
- W2146408065 hasConceptScore W2146408065C119440689 @default.
- W2146408065 hasConceptScore W2146408065C119599485 @default.
- W2146408065 hasConceptScore W2146408065C120665830 @default.
- W2146408065 hasConceptScore W2146408065C121332964 @default.
- W2146408065 hasConceptScore W2146408065C127413603 @default.
- W2146408065 hasConceptScore W2146408065C136525101 @default.
- W2146408065 hasConceptScore W2146408065C13655849 @default.
- W2146408065 hasConceptScore W2146408065C142724271 @default.
- W2146408065 hasConceptScore W2146408065C159985019 @default.
- W2146408065 hasConceptScore W2146408065C160671074 @default.
- W2146408065 hasConceptScore W2146408065C168834538 @default.
- W2146408065 hasConceptScore W2146408065C191897082 @default.
- W2146408065 hasConceptScore W2146408065C192562407 @default.
- W2146408065 hasConceptScore W2146408065C204787440 @default.
- W2146408065 hasConceptScore W2146408065C206755178 @default.
- W2146408065 hasConceptScore W2146408065C24890656 @default.
- W2146408065 hasConceptScore W2146408065C2779227376 @default.
- W2146408065 hasConceptScore W2146408065C2780330379 @default.
- W2146408065 hasConceptScore W2146408065C2984025587 @default.
- W2146408065 hasConceptScore W2146408065C37977207 @default.
- W2146408065 hasConceptScore W2146408065C49040817 @default.
- W2146408065 hasConceptScore W2146408065C520434653 @default.
- W2146408065 hasConceptScore W2146408065C62520636 @default.
- W2146408065 hasConceptScore W2146408065C71924100 @default.
- W2146408065 hasConceptScore W2146408065C74650414 @default.
- W2146408065 hasConceptScore W2146408065C89805583 @default.
- W2146408065 hasLocation W21464080651 @default.
- W2146408065 hasOpenAccess W2146408065 @default.
- W2146408065 hasPrimaryLocation W21464080651 @default.
- W2146408065 hasRelatedWork W1965527644 @default.
- W2146408065 hasRelatedWork W2103620583 @default.
- W2146408065 hasRelatedWork W2146408065 @default.
- W2146408065 hasRelatedWork W2147065145 @default.
- W2146408065 hasRelatedWork W2161432007 @default.
- W2146408065 hasRelatedWork W2310266245 @default.
- W2146408065 hasRelatedWork W2739119237 @default.
- W2146408065 hasRelatedWork W2911329264 @default.
- W2146408065 hasRelatedWork W2922271745 @default.
- W2146408065 hasRelatedWork W4245472411 @default.
- W2146408065 isParatext "false" @default.
- W2146408065 isRetracted "false" @default.
- W2146408065 magId "2146408065" @default.
- W2146408065 workType "article" @default.