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- W2146675115 abstract "We provide a convenient recipe for fabricating reliable superconducting microbolometers as acoustic phonon detectors with sub-nanosecond response, using image-reversal optical lithography and dc-magnetron sputtering, and our recipe requires no chemical or plasma etching. Our approach solves the traditional problem for granular aluminium bolometers of unreliable (i.e., non-Ohmic) electrical contacts by sequentially sputtering the granular aluminium film and then a palladium capping layer. We use dc calibration data, the method of Danilchenko et al. [1], and direct nanosecond-pulsed photoexcitation to obtain the microbolometer's characteristic current, thermal conductance, characteristic relaxation time, and heat capacity. We also demonstrate the use of the deconvolution algorithm of Edwards et al. [2] to obtain the phonon flux in a heat pulse experiment with nanosecond resolution." @default.
- W2146675115 created "2016-06-24" @default.
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- W2146675115 date "2007-12-01" @default.
- W2146675115 modified "2023-10-13" @default.
- W2146675115 title "Fabrication of robust superconducting granular aluminium/palladium bilayer microbolometers with sub-nanosecond response" @default.
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- W2146675115 doi "https://doi.org/10.1088/1742-6596/92/1/012180" @default.
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