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- W2146794985 abstract "Many university and government campuses have rapidly expanding “Green Energy” programs. These programs often include a mix of solar photovoltaic power, wind power, fuel cells, and other low-carbon sources. Unfortunately, practical experience has shown serious problems with these sources powering sensitive fab tools. A better solution is to operate the fab tools from traditional utility-provided power, then use the “green” power to operate less-sensitive fab support equipment: chillers, CDA compressors, CDW pumps, and so forth. This less-sensitive equipment often consumes half or more of the entire fab energy budget, and is readily adaptable - with some small technical effort - to tolerate the power disturbances found on a “green” grid." @default.
- W2146794985 created "2016-06-24" @default.
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- W2146794985 date "2012-07-01" @default.
- W2146794985 modified "2023-09-26" @default.
- W2146794985 title "Fab Pitfalls with Green Energy at University and Government Campuses" @default.
- W2146794985 doi "https://doi.org/10.1109/ugim.2012.6247068" @default.
- W2146794985 hasPublicationYear "2012" @default.
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