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- W2146843485 abstract "The paper demonstrates possibilities to improve the overall equipment effectiveness (OEE) for ion implantation equipment in terms of throughput and cycle time. Procedures for automated data collection are presented, along with a description of the underlying models for static and dynamic throughput, strategies to implement these partly conflicting requirements, and guidelines for an automated dispatch management." @default.
- W2146843485 created "2016-06-24" @default.
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- W2146843485 date "2003-07-10" @default.
- W2146843485 modified "2023-09-24" @default.
- W2146843485 title "Manufacturing science in ion implantation" @default.
- W2146843485 doi "https://doi.org/10.1109/iit.2000.924161" @default.
- W2146843485 hasPublicationYear "2003" @default.
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