FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2147070611> ?p ?o ?g. }

• W2147070611 endingPage "239" @default.
• W2147070611 startingPage "235" @default.
• W2147070611 abstract "We examine the characteristics of TaLaN metal gates in direct contact with HfO2 dielectric, in particular focusing on the effect of La in the gate stack for NMOS applications. Effective work functions (EWF) and vacuum work functions (WF) are measured as a function of lanthanum content in TaLaN without any intentional heating using X-ray photoelectron spectroscopy, U-V photoelectron spectroscopy, and electrical C–V measurements. We find that the addition of lanthanum to tantalum nitride lowered both the EWF and the WF of the metal gate by ∼0.2 eV and ∼0.9 eV, respectively. Furthermore, XPS indicates that lanthanum in TaLaN at the interface with HfO2 is primarily bonded to nitrogen rather than oxygen and not reacting with the dielectric." @default.
• W2147070611 created "2016-06-24" @default.
• W2147070611 creator A5038563397 @default.
• W2147070611 creator A5041792310 @default.
• W2147070611 creator A5057747236 @default.
• W2147070611 creator A5081690749 @default.
• W2147070611 creator A5082224309 @default.
• W2147070611 date "2009-03-01" @default.
• W2147070611 modified "2023-09-24" @default.
• W2147070611 title "Role of lanthanum in the gate stack: Co-sputtered TaLaN metal gates on Hf-based dielectrics" @default.
• W2147070611 cites W1981248595 @default.
• W2147070611 cites W1989383764 @default.
• W2147070611 cites W1997034470 @default.
• W2147070611 cites W2003645630 @default.
• W2147070611 cites W2030547735 @default.
• W2147070611 cites W2046255626 @default.
• W2147070611 cites W2056482876 @default.
• W2147070611 cites W2075609271 @default.
• W2147070611 cites W2084196976 @default.
• W2147070611 cites W2086577193 @default.
• W2147070611 cites W2102672404 @default.
• W2147070611 cites W2112340566 @default.
• W2147070611 cites W2155066043 @default.
• W2147070611 doi "https://doi.org/10.1016/j.mee.2008.05.027" @default.
• W2147070611 hasPublicationYear "2009" @default.
• W2147070611 type Work @default.
• W2147070611 sameAs 2147070611 @default.
• W2147070611 citedByCount "5" @default.
• W2147070611 countsByYear W21470706112012 @default.
• W2147070611 countsByYear W21470706112018 @default.
• W2147070611 countsByYear W21470706112022 @default.
• W2147070611 crossrefType "journal-article" @default.
• W2147070611 hasAuthorship W2147070611A5038563397 @default.
• W2147070611 hasAuthorship W2147070611A5041792310 @default.
• W2147070611 hasAuthorship W2147070611A5057747236 @default.
• W2147070611 hasAuthorship W2147070611A5081690749 @default.
• W2147070611 hasAuthorship W2147070611A5082224309 @default.
• W2147070611 hasConcept C113196181 @default.
• W2147070611 hasConcept C115235246 @default.
• W2147070611 hasConcept C119599485 @default.
• W2147070611 hasConcept C121332964 @default.
• W2147070611 hasConcept C127413603 @default.
• W2147070611 hasConcept C133386390 @default.
• W2147070611 hasConcept C16317505 @default.
• W2147070611 hasConcept C165801399 @default.
• W2147070611 hasConcept C166972891 @default.
• W2147070611 hasConcept C171250308 @default.
• W2147070611 hasConcept C172385210 @default.
• W2147070611 hasConcept C175708663 @default.
• W2147070611 hasConcept C179104552 @default.
• W2147070611 hasConcept C185592680 @default.
• W2147070611 hasConcept C191897082 @default.
• W2147070611 hasConcept C192562407 @default.
• W2147070611 hasConcept C194760766 @default.
• W2147070611 hasConcept C197162436 @default.
• W2147070611 hasConcept C199360897 @default.
• W2147070611 hasConcept C2361726 @default.
• W2147070611 hasConcept C2778112282 @default.
• W2147070611 hasConcept C2779227376 @default.
• W2147070611 hasConcept C41008148 @default.
• W2147070611 hasConcept C43617362 @default.
• W2147070611 hasConcept C46141821 @default.
• W2147070611 hasConcept C49040817 @default.
• W2147070611 hasConcept C51140833 @default.
• W2147070611 hasConcept C514619126 @default.
• W2147070611 hasConcept C544153396 @default.
• W2147070611 hasConcept C555894677 @default.
• W2147070611 hasConcept C9395851 @default.
• W2147070611 hasConceptScore W2147070611C113196181 @default.
• W2147070611 hasConceptScore W2147070611C115235246 @default.
• W2147070611 hasConceptScore W2147070611C119599485 @default.
• W2147070611 hasConceptScore W2147070611C121332964 @default.
• W2147070611 hasConceptScore W2147070611C127413603 @default.
• W2147070611 hasConceptScore W2147070611C133386390 @default.
• W2147070611 hasConceptScore W2147070611C16317505 @default.
• W2147070611 hasConceptScore W2147070611C165801399 @default.
• W2147070611 hasConceptScore W2147070611C166972891 @default.
• W2147070611 hasConceptScore W2147070611C171250308 @default.
• W2147070611 hasConceptScore W2147070611C172385210 @default.
• W2147070611 hasConceptScore W2147070611C175708663 @default.
• W2147070611 hasConceptScore W2147070611C179104552 @default.
• W2147070611 hasConceptScore W2147070611C185592680 @default.
• W2147070611 hasConceptScore W2147070611C191897082 @default.
• W2147070611 hasConceptScore W2147070611C192562407 @default.
• W2147070611 hasConceptScore W2147070611C194760766 @default.
• W2147070611 hasConceptScore W2147070611C197162436 @default.
• W2147070611 hasConceptScore W2147070611C199360897 @default.
• W2147070611 hasConceptScore W2147070611C2361726 @default.
• W2147070611 hasConceptScore W2147070611C2778112282 @default.
• W2147070611 hasConceptScore W2147070611C2779227376 @default.
• W2147070611 hasConceptScore W2147070611C41008148 @default.
• W2147070611 hasConceptScore W2147070611C43617362 @default.
• W2147070611 hasConceptScore W2147070611C46141821 @default.
• W2147070611 hasConceptScore W2147070611C49040817 @default.
• W2147070611 hasConceptScore W2147070611C51140833 @default.
• W2147070611 hasConceptScore W2147070611C514619126 @default.
• W2147070611 hasConceptScore W2147070611C544153396 @default.
• W2147070611 hasConceptScore W2147070611C555894677 @default.

• next