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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2147133869> ?p ?o ?g. }

• W2147133869 abstract "A two-axis in-plane capacitive accelerometer fabricated on silicon-on-insulator (SOI) is developed. With each stationary electrode separated to two sub stationary electrodes by refilled isolation trench, the presented accelerometer has compact differential capacitance electrodes to improve capacitance sensitivity per sensing area. In addition, the overlap area-changed capacitor enables good linearity and low damping coefficient." @default.
• W2147133869 created "2016-06-24" @default.
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• W2147133869 date "2011-06-01" @default.
• W2147133869 modified "2023-09-23" @default.
• W2147133869 title "Compact electrode design for in-plane accelerometer on SOI with refilled isolation trench" @default.
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• W2147133869 doi "https://doi.org/10.1109/transducers.2011.5969139" @default.
• W2147133869 hasPublicationYear "2011" @default.
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