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- W2147227777 abstract "Several different fabrication techniques and materials have been proposed for the realization of low loss high-Q micromachined filters or tunable filters. In this paper a review of several filters that have been proposed over the last years is presented, including a discussion of topologies and the structures used to make microwave filters" @default.
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- W2147227777 date "2007-02-01" @default.
- W2147227777 modified "2023-09-23" @default.
- W2147227777 title "Review on Microwave and Millimeter Filters Using MEMS Technology" @default.
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- W2147227777 doi "https://doi.org/10.1109/conielecomp.2007.31" @default.
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