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- W2147241566 abstract "An apparent negative activation energy behavior in electromigration lifetime was observed for Cu/low-k single damascene interconnects. We explain this as a result of a fast failure mode by thermo-mechanical damage at low temperatures around 250/spl deg/C. Mechanical strengthening of the via by thickening the sidewall barrier and surrounding it with strong inter-layer dielectric have successfully suppressed the thermo-mechanical failures and restored the activation energy behavior to normal. We show that ensuring thermo-mechanical stability is a key concern for developing reliable high performance interconnects." @default.
- W2147241566 created "2016-06-24" @default.
- W2147241566 creator A5026979407 @default.
- W2147241566 creator A5072589626 @default.
- W2147241566 creator A5089451409 @default.
- W2147241566 date "2005-08-16" @default.
- W2147241566 modified "2023-09-24" @default.
- W2147241566 title "Observation and restoration of negative electromigration activation energy behavior due to thermo-mechanical effects" @default.
- W2147241566 cites W1622548709 @default.
- W2147241566 cites W1822091263 @default.
- W2147241566 cites W1991781594 @default.
- W2147241566 cites W2007740395 @default.
- W2147241566 cites W2045383364 @default.
- W2147241566 cites W2072494209 @default.
- W2147241566 cites W2081786181 @default.
- W2147241566 cites W2083234109 @default.
- W2147241566 cites W2137075194 @default.
- W2147241566 cites W2157888415 @default.
- W2147241566 cites W2543798454 @default.
- W2147241566 cites W2545380363 @default.
- W2147241566 doi "https://doi.org/10.1109/relphy.2005.1493055" @default.
- W2147241566 hasPublicationYear "2005" @default.
- W2147241566 type Work @default.
- W2147241566 sameAs 2147241566 @default.
- W2147241566 citedByCount "3" @default.
- W2147241566 countsByYear W21472415662013 @default.
- W2147241566 crossrefType "proceedings-article" @default.
- W2147241566 hasAuthorship W2147241566A5026979407 @default.
- W2147241566 hasAuthorship W2147241566A5072589626 @default.
- W2147241566 hasAuthorship W2147241566A5089451409 @default.
- W2147241566 hasConcept C116372231 @default.
- W2147241566 hasConcept C133386390 @default.
- W2147241566 hasConcept C138055206 @default.
- W2147241566 hasConcept C159985019 @default.
- W2147241566 hasConcept C178790620 @default.
- W2147241566 hasConcept C185592680 @default.
- W2147241566 hasConcept C192562407 @default.
- W2147241566 hasConcept C2779227376 @default.
- W2147241566 hasConcept C49040817 @default.
- W2147241566 hasConcept C66283442 @default.
- W2147241566 hasConcept C95121573 @default.
- W2147241566 hasConceptScore W2147241566C116372231 @default.
- W2147241566 hasConceptScore W2147241566C133386390 @default.
- W2147241566 hasConceptScore W2147241566C138055206 @default.
- W2147241566 hasConceptScore W2147241566C159985019 @default.
- W2147241566 hasConceptScore W2147241566C178790620 @default.
- W2147241566 hasConceptScore W2147241566C185592680 @default.
- W2147241566 hasConceptScore W2147241566C192562407 @default.
- W2147241566 hasConceptScore W2147241566C2779227376 @default.
- W2147241566 hasConceptScore W2147241566C49040817 @default.
- W2147241566 hasConceptScore W2147241566C66283442 @default.
- W2147241566 hasConceptScore W2147241566C95121573 @default.
- W2147241566 hasLocation W21472415661 @default.
- W2147241566 hasOpenAccess W2147241566 @default.
- W2147241566 hasPrimaryLocation W21472415661 @default.
- W2147241566 hasRelatedWork W1837932064 @default.
- W2147241566 hasRelatedWork W1992257316 @default.
- W2147241566 hasRelatedWork W1995256265 @default.
- W2147241566 hasRelatedWork W2021714583 @default.
- W2147241566 hasRelatedWork W2042197634 @default.
- W2147241566 hasRelatedWork W2066480267 @default.
- W2147241566 hasRelatedWork W2147241566 @default.
- W2147241566 hasRelatedWork W2383379936 @default.
- W2147241566 hasRelatedWork W4254418869 @default.
- W2147241566 hasRelatedWork W4280616684 @default.
- W2147241566 isParatext "false" @default.
- W2147241566 isRetracted "false" @default.
- W2147241566 magId "2147241566" @default.
- W2147241566 workType "article" @default.