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- W2147382322 abstract "There presently exists the need to measure the postanneal thickness of silicide films deposited on Si. In addition, there exists the need to monitor the deposition parameters of silicide films, since variations in the deposition process may alter the film stoichiometry, density, and preanneal electrical resistivity. In this paper we describe results of efforts to satisfy these needs using a thermal-wave Therma-Probe 100." @default.
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- W2147382322 date "1984-10-01" @default.
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- W2147382322 title "Thermal-wave measurements and monitoring of TaSi<i>x</i> silicide film properties" @default.
- W2147382322 doi "https://doi.org/10.1116/1.582866" @default.
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