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- W2148609580 abstract "A comparison of TiSi/sub 2/ and CoSi/sub 2/ for the SALICIDE (self-aligned silicide) process is presented. Both TiSi/sub 2/ and CoSi/sub 2/ are formed by RTA in nitrogen. The comparison is based on the formation kinetics, film properties, process compatibilities, and electrical properties. The results are summarized in table form. Co silicide is found to be a better candidate for use in SALICIDE process for submicron devices because it has a less severe lateral gate-S/D encroachment problem, less sensitivity to oxygen, higher resistivity to dry/wet etch, less film stress, better sheet resistance control, less junction leakage, the capability to form low-resistance polycide, and shallow junctions. However, substrate cleaning must ensure no SiO/sub 2/ on Si surfaces that are to be converted to CoSi/sub 2/.< <ETX xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>></ETX>" @default.
- W2148609580 created "2016-06-24" @default.
- W2148609580 creator A5039958731 @default.
- W2148609580 creator A5046424845 @default.
- W2148609580 creator A5056804704 @default.
- W2148609580 creator A5066684934 @default.
- W2148609580 creator A5076573098 @default.
- W2148609580 creator A5081968800 @default.
- W2148609580 date "2003-01-13" @default.
- W2148609580 modified "2023-09-24" @default.
- W2148609580 title "Comparison of cobalt and titanium silicides for SALICIDE process and shallow junction formation" @default.
- W2148609580 cites W1988555245 @default.
- W2148609580 cites W2084469462 @default.
- W2148609580 doi "https://doi.org/10.1109/vmic.1989.78027" @default.
- W2148609580 hasPublicationYear "2003" @default.
- W2148609580 type Work @default.
- W2148609580 sameAs 2148609580 @default.
- W2148609580 citedByCount "6" @default.
- W2148609580 crossrefType "proceedings-article" @default.
- W2148609580 hasAuthorship W2148609580A5039958731 @default.
- W2148609580 hasAuthorship W2148609580A5046424845 @default.
- W2148609580 hasAuthorship W2148609580A5056804704 @default.
- W2148609580 hasAuthorship W2148609580A5066684934 @default.
- W2148609580 hasAuthorship W2148609580A5076573098 @default.
- W2148609580 hasAuthorship W2148609580A5081968800 @default.
- W2148609580 hasConcept C111368507 @default.
- W2148609580 hasConcept C119599485 @default.
- W2148609580 hasConcept C127313418 @default.
- W2148609580 hasConcept C127413603 @default.
- W2148609580 hasConcept C171250308 @default.
- W2148609580 hasConcept C173118649 @default.
- W2148609580 hasConcept C191897082 @default.
- W2148609580 hasConcept C192562407 @default.
- W2148609580 hasConcept C2777289219 @default.
- W2148609580 hasConcept C2779227376 @default.
- W2148609580 hasConcept C2780901251 @default.
- W2148609580 hasConcept C49040817 @default.
- W2148609580 hasConcept C506065880 @default.
- W2148609580 hasConcept C515602321 @default.
- W2148609580 hasConcept C544956773 @default.
- W2148609580 hasConcept C66825105 @default.
- W2148609580 hasConcept C69990965 @default.
- W2148609580 hasConceptScore W2148609580C111368507 @default.
- W2148609580 hasConceptScore W2148609580C119599485 @default.
- W2148609580 hasConceptScore W2148609580C127313418 @default.
- W2148609580 hasConceptScore W2148609580C127413603 @default.
- W2148609580 hasConceptScore W2148609580C171250308 @default.
- W2148609580 hasConceptScore W2148609580C173118649 @default.
- W2148609580 hasConceptScore W2148609580C191897082 @default.
- W2148609580 hasConceptScore W2148609580C192562407 @default.
- W2148609580 hasConceptScore W2148609580C2777289219 @default.
- W2148609580 hasConceptScore W2148609580C2779227376 @default.
- W2148609580 hasConceptScore W2148609580C2780901251 @default.
- W2148609580 hasConceptScore W2148609580C49040817 @default.
- W2148609580 hasConceptScore W2148609580C506065880 @default.
- W2148609580 hasConceptScore W2148609580C515602321 @default.
- W2148609580 hasConceptScore W2148609580C544956773 @default.
- W2148609580 hasConceptScore W2148609580C66825105 @default.
- W2148609580 hasConceptScore W2148609580C69990965 @default.
- W2148609580 hasLocation W21486095801 @default.
- W2148609580 hasOpenAccess W2148609580 @default.
- W2148609580 hasPrimaryLocation W21486095801 @default.
- W2148609580 hasRelatedWork W1990410292 @default.
- W2148609580 hasRelatedWork W2036569220 @default.
- W2148609580 hasRelatedWork W2072136513 @default.
- W2148609580 hasRelatedWork W2091249493 @default.
- W2148609580 hasRelatedWork W2097767931 @default.
- W2148609580 hasRelatedWork W2116171376 @default.
- W2148609580 hasRelatedWork W2148609580 @default.
- W2148609580 hasRelatedWork W2150461705 @default.
- W2148609580 hasRelatedWork W2183609555 @default.
- W2148609580 hasRelatedWork W2468882249 @default.
- W2148609580 isParatext "false" @default.
- W2148609580 isRetracted "false" @default.
- W2148609580 magId "2148609580" @default.
- W2148609580 workType "article" @default.