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- W2148707952 abstract "The paper reports the design, fabrication and operation of a two-dimensional (2D) micromirror that can generate large bidirectional scans at low actuation voltages. The micromirror device has been fabricated using a unique DRIE CMOS-MEMS process that can simultaneously provide thin-film and single-crystal silicon microstructures. A fabricated micromirror has negligible initial tilt angle, and can perform large bidirectional 2D optical scans (over /spl plusmn/30/spl deg/) at less than 12 Vdc. 2D scanning using this mirror has been demonstrated by obtaining a 14/spl deg/ by 50/spl deg/ angular raster scan pattern." @default.
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- W2148707952 date "2005-08-24" @default.
- W2148707952 modified "2023-10-16" @default.
- W2148707952 title "An electrothermal SCS micromirror for large Bi-directional 2-D scanning" @default.
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- W2148707952 doi "https://doi.org/10.1109/sensor.2005.1496621" @default.
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