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- W2148759165 abstract "Summary form only given. Sulphur hexafluoride (SF/sub 6/) is useful as an insulator of a circuit breaker and as an etcher of semiconductors. Since SF/sub 6/ is one of greenhouse gases, emission of SF/sub 6/ must be limited and reduced. Investigation on removal method of SF/sub 6/ was carried out by using a pulsed corona reactor. An experimental setup is presented. The electrode of the corona reactor is arranged in a co-axial wire-cylinder configuration. The cylindrical tube is used as a cathode electrode and the wire anode electrode is aligned with the center axis of the cylindrical cathode. The concentration of SF/sub 6/ is measured with an absorption spectrometry. The corona reactor and a cell for measurement of SF/sub 6/ absorption in a sample gas are set in a closed gas loop equipped with two buffer chambers. The sample gas flows constantly in closed gas loop. The buffer chambers play a role to fix the concentration of SF/sub 6/ at an inlet of the corona. reactor during one measurement. The sample gas consists of SF/sub 6/ and helium. The pressure of sample gas is 1 atm. The pulsed voltage circuit is a type of capacitor charge transfer." @default.
- W2148759165 created "2016-06-24" @default.
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- W2148759165 date "2002-11-13" @default.
- W2148759165 modified "2023-09-24" @default.
- W2148759165 title "Removal of dilute SF/sub 6/ in He by a pulsed corona reactor" @default.
- W2148759165 doi "https://doi.org/10.1109/ppps.2001.961414" @default.
- W2148759165 hasPublicationYear "2002" @default.
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