FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2148884717> ?p ?o ?g. }

• W2148884717 endingPage "D351" @default.
• W2148884717 startingPage "D351" @default.
• W2148884717 abstract "Electrodeposition of copper in the presence of a multicomponent additives mixture, consisting of an inhibitor [e.g., poly(ethylene glycol)] and an accelerator [e.g., bis(3-sulfopropyl) disulfide] that is typically used in the bottom-up fill of submicrometer vias and trenches on semiconductor wafers, is analyzed. The additives transport, adsorption, and interactions are incorporated in a time-dependent multicomponent model that provides the additives distribution inside the via. The additives distribution is translated into location- and time-dependent copper deposition rates to simulate the via-fill process. All model parameters are based on experimentally measured transient copper deposition kinetics in the presence of additives. The effect of the local area reduction during the via fill on the additives distribution is incorporated into the simulations. The model indicates that the short time scale additives transport and adsorption processes provide a differential additives coverage between the via top and its bottom sufficient to initiate bottom-up growth. The long time-scale accelerator–inhibitor interactions in combination with the local area reduction effects provide further enhancement to the additives-induced differential plating rates. The latter generates the bottom-up deposition necessary for the void-free gap fill of high aspect ratio structures." @default.
• W2148884717 created "2016-06-24" @default.
• W2148884717 creator A5013794190 @default.
• W2148884717 creator A5036561235 @default.
• W2148884717 date "2009-01-01" @default.
• W2148884717 modified "2023-10-05" @default.
• W2148884717 title "Mechanistic Analysis of the “Bottom-Up” Fill in Copper Interconnect Metallization" @default.
• W2148884717 cites W1594837225 @default.
• W2148884717 cites W1861829594 @default.
• W2148884717 cites W1978391578 @default.
• W2148884717 cites W1997629780 @default.
• W2148884717 cites W1999279146 @default.
• W2148884717 cites W2001637099 @default.
• W2148884717 cites W2020263658 @default.
• W2148884717 cites W2027228089 @default.
• W2148884717 cites W2045586820 @default.
• W2148884717 cites W2047111583 @default.
• W2148884717 cites W2079891190 @default.
• W2148884717 cites W2088027246 @default.
• W2148884717 cites W2103480251 @default.
• W2148884717 cites W2113238227 @default.
• W2148884717 cites W2125623767 @default.
• W2148884717 cites W2140454529 @default.
• W2148884717 cites W2143485111 @default.
• W2148884717 cites W2161457407 @default.
• W2148884717 cites W2166006082 @default.
• W2148884717 cites W2171908409 @default.
• W2148884717 cites W2386216101 @default.
• W2148884717 cites W4231908508 @default.
• W2148884717 doi "https://doi.org/10.1149/1.3156640" @default.
• W2148884717 hasPublicationYear "2009" @default.
• W2148884717 type Work @default.
• W2148884717 sameAs 2148884717 @default.
• W2148884717 citedByCount "100" @default.
• W2148884717 countsByYear W21488847172012 @default.
• W2148884717 countsByYear W21488847172013 @default.
• W2148884717 countsByYear W21488847172014 @default.
• W2148884717 countsByYear W21488847172015 @default.
• W2148884717 countsByYear W21488847172016 @default.
• W2148884717 countsByYear W21488847172017 @default.
• W2148884717 countsByYear W21488847172018 @default.
• W2148884717 countsByYear W21488847172019 @default.
• W2148884717 countsByYear W21488847172020 @default.
• W2148884717 countsByYear W21488847172021 @default.
• W2148884717 countsByYear W21488847172022 @default.
• W2148884717 countsByYear W21488847172023 @default.
• W2148884717 crossrefType "journal-article" @default.
• W2148884717 hasAuthorship W2148884717A5013794190 @default.
• W2148884717 hasAuthorship W2148884717A5036561235 @default.
• W2148884717 hasConcept C116372231 @default.
• W2148884717 hasConcept C121332964 @default.
• W2148884717 hasConcept C123745756 @default.
• W2148884717 hasConcept C127413603 @default.
• W2148884717 hasConcept C148898269 @default.
• W2148884717 hasConcept C150394285 @default.
• W2148884717 hasConcept C151730666 @default.
• W2148884717 hasConcept C159985019 @default.
• W2148884717 hasConcept C160671074 @default.
• W2148884717 hasConcept C171250308 @default.
• W2148884717 hasConcept C178790620 @default.
• W2148884717 hasConcept C185592680 @default.
• W2148884717 hasConcept C191897082 @default.
• W2148884717 hasConcept C192562407 @default.
• W2148884717 hasConcept C2779227376 @default.
• W2148884717 hasConcept C2779772531 @default.
• W2148884717 hasConcept C2816523 @default.
• W2148884717 hasConcept C29216876 @default.
• W2148884717 hasConcept C31258907 @default.
• W2148884717 hasConcept C41008148 @default.
• W2148884717 hasConcept C42360764 @default.
• W2148884717 hasConcept C51807945 @default.
• W2148884717 hasConcept C544778455 @default.
• W2148884717 hasConcept C62520636 @default.
• W2148884717 hasConcept C64297162 @default.
• W2148884717 hasConcept C86803240 @default.
• W2148884717 hasConceptScore W2148884717C116372231 @default.
• W2148884717 hasConceptScore W2148884717C121332964 @default.
• W2148884717 hasConceptScore W2148884717C123745756 @default.
• W2148884717 hasConceptScore W2148884717C127413603 @default.
• W2148884717 hasConceptScore W2148884717C148898269 @default.
• W2148884717 hasConceptScore W2148884717C150394285 @default.
• W2148884717 hasConceptScore W2148884717C151730666 @default.
• W2148884717 hasConceptScore W2148884717C159985019 @default.
• W2148884717 hasConceptScore W2148884717C160671074 @default.
• W2148884717 hasConceptScore W2148884717C171250308 @default.
• W2148884717 hasConceptScore W2148884717C178790620 @default.
• W2148884717 hasConceptScore W2148884717C185592680 @default.
• W2148884717 hasConceptScore W2148884717C191897082 @default.
• W2148884717 hasConceptScore W2148884717C192562407 @default.
• W2148884717 hasConceptScore W2148884717C2779227376 @default.
• W2148884717 hasConceptScore W2148884717C2779772531 @default.
• W2148884717 hasConceptScore W2148884717C2816523 @default.
• W2148884717 hasConceptScore W2148884717C29216876 @default.
• W2148884717 hasConceptScore W2148884717C31258907 @default.
• W2148884717 hasConceptScore W2148884717C41008148 @default.
• W2148884717 hasConceptScore W2148884717C42360764 @default.
• W2148884717 hasConceptScore W2148884717C51807945 @default.
• W2148884717 hasConceptScore W2148884717C544778455 @default.

• next