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- W2149069570 abstract "This paper reports on preliminary results in the production of novel silicon micromachined structures in thick Silicon On Insulator (SOI) at DERA (Malvern). Significant interest in SOI for micromachining has existed for several years, however, until recently the quality of SOI material was not sufficiently high to make it a viable alternative to mainstream bulk silicon technology. Specially designed thick SOI layers have been deep dry etched and structures released to demonstrate the applicability of the material and etch technique to micromachining. An exciting combination of the advantages of both surface and bulk micromachining is offered by SOI. The process used is fully compatible with CMOS and it is thought that the SOI material will become of major importance in many areas of micromachining, particularly micro-inertial components." @default.
- W2149069570 created "2016-06-24" @default.
- W2149069570 creator A5012461719 @default.
- W2149069570 creator A5034133519 @default.
- W2149069570 creator A5034984795 @default.
- W2149069570 creator A5054879308 @default.
- W2149069570 creator A5083245088 @default.
- W2149069570 creator A5085233251 @default.
- W2149069570 creator A5088776926 @default.
- W2149069570 date "2002-11-23" @default.
- W2149069570 modified "2023-09-23" @default.
- W2149069570 title "Deep dry etching of SOI for silicon micromachined structures" @default.
- W2149069570 cites W2042156902 @default.
- W2149069570 doi "https://doi.org/10.1109/soi.1997.634932" @default.
- W2149069570 hasPublicationYear "2002" @default.
- W2149069570 type Work @default.
- W2149069570 sameAs 2149069570 @default.
- W2149069570 citedByCount "4" @default.
- W2149069570 crossrefType "proceedings-article" @default.
- W2149069570 hasAuthorship W2149069570A5012461719 @default.
- W2149069570 hasAuthorship W2149069570A5034133519 @default.
- W2149069570 hasAuthorship W2149069570A5034984795 @default.
- W2149069570 hasAuthorship W2149069570A5054879308 @default.
- W2149069570 hasAuthorship W2149069570A5083245088 @default.
- W2149069570 hasAuthorship W2149069570A5085233251 @default.
- W2149069570 hasAuthorship W2149069570A5088776926 @default.
- W2149069570 hasConcept C100460472 @default.
- W2149069570 hasConcept C1291036 @default.
- W2149069570 hasConcept C136525101 @default.
- W2149069570 hasConcept C142724271 @default.
- W2149069570 hasConcept C145667562 @default.
- W2149069570 hasConcept C171250308 @default.
- W2149069570 hasConcept C192562407 @default.
- W2149069570 hasConcept C204787440 @default.
- W2149069570 hasConcept C2779227376 @default.
- W2149069570 hasConcept C37977207 @default.
- W2149069570 hasConcept C41075158 @default.
- W2149069570 hasConcept C49040817 @default.
- W2149069570 hasConcept C53143962 @default.
- W2149069570 hasConcept C544956773 @default.
- W2149069570 hasConcept C71924100 @default.
- W2149069570 hasConceptScore W2149069570C100460472 @default.
- W2149069570 hasConceptScore W2149069570C1291036 @default.
- W2149069570 hasConceptScore W2149069570C136525101 @default.
- W2149069570 hasConceptScore W2149069570C142724271 @default.
- W2149069570 hasConceptScore W2149069570C145667562 @default.
- W2149069570 hasConceptScore W2149069570C171250308 @default.
- W2149069570 hasConceptScore W2149069570C192562407 @default.
- W2149069570 hasConceptScore W2149069570C204787440 @default.
- W2149069570 hasConceptScore W2149069570C2779227376 @default.
- W2149069570 hasConceptScore W2149069570C37977207 @default.
- W2149069570 hasConceptScore W2149069570C41075158 @default.
- W2149069570 hasConceptScore W2149069570C49040817 @default.
- W2149069570 hasConceptScore W2149069570C53143962 @default.
- W2149069570 hasConceptScore W2149069570C544956773 @default.
- W2149069570 hasConceptScore W2149069570C71924100 @default.
- W2149069570 hasLocation W21490695701 @default.
- W2149069570 hasOpenAccess W2149069570 @default.
- W2149069570 hasPrimaryLocation W21490695701 @default.
- W2149069570 hasRelatedWork W1569543129 @default.
- W2149069570 hasRelatedWork W1650097225 @default.
- W2149069570 hasRelatedWork W1852437800 @default.
- W2149069570 hasRelatedWork W1973883640 @default.
- W2149069570 hasRelatedWork W2008760587 @default.
- W2149069570 hasRelatedWork W2082031831 @default.
- W2149069570 hasRelatedWork W2110653485 @default.
- W2149069570 hasRelatedWork W2122690958 @default.
- W2149069570 hasRelatedWork W2127509219 @default.
- W2149069570 hasRelatedWork W2143898235 @default.
- W2149069570 hasRelatedWork W2147782275 @default.
- W2149069570 hasRelatedWork W2153911340 @default.
- W2149069570 hasRelatedWork W2258329882 @default.
- W2149069570 hasRelatedWork W2317497535 @default.
- W2149069570 hasRelatedWork W2544653129 @default.
- W2149069570 hasRelatedWork W2756464537 @default.
- W2149069570 hasRelatedWork W2791216791 @default.
- W2149069570 hasRelatedWork W3150540031 @default.
- W2149069570 hasRelatedWork W785538766 @default.
- W2149069570 hasRelatedWork W2186065451 @default.
- W2149069570 isParatext "false" @default.
- W2149069570 isRetracted "false" @default.
- W2149069570 magId "2149069570" @default.
- W2149069570 workType "article" @default.