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- W2149122290 abstract "A new tool with which to monitor the quality (roughness and subsurface damage) of optical surfaces during grinding and polishing, intensity-detecting total internal reflection microscopy (iTIRM), is presented. A general description of the new measurement method is given, followed by a description of the experimental in situ measurement setup. Experimental results of the method are presented that demonstrate that iTIRM can be used either to control the roughness-reduction process during production or to investigate the process itself. The possibility of implementing the method in an optical workshop is discussed." @default.
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- W2149122290 date "2000-07-01" @default.
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- W2149122290 title "In-process monitoring of grinding and polishing of optical surfaces" @default.
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- W2149122290 doi "https://doi.org/10.1364/ao.39.003300" @default.
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