Matches in SemOpenAlex for { <https://semopenalex.org/work/W2149218247> ?p ?o ?g. }
- W2149218247 endingPage "196" @default.
- W2149218247 startingPage "179" @default.
- W2149218247 abstract "Microelectromechanical systems (MEMS) have recently become an important area of technology, building on the success of the microelectronics industry over the past 50 years. MEMS combine mechanical and electrical function in devices at very small scales. Examples include pressure sensors, accelerometers, gyroscopes and optical devices, as well as chemical, biomedical and fluidic applications. The status of MEMS technology is reviewed with particular emphasis on materials issues therein. The materials issues in MEMS are divided into three categories, the MEMS material set, microfabrication processes, and material characterization and design. Each of these areas is addressed, with particular emphasis on the potential impact of materials solutions. A discussion of the future of MEMS and the role of materials in that future is given." @default.
- W2149218247 created "2016-06-24" @default.
- W2149218247 creator A5065476124 @default.
- W2149218247 date "2000-01-01" @default.
- W2149218247 modified "2023-10-11" @default.
- W2149218247 title "Materials issues in microelectromechanical systems (MEMS)" @default.
- W2149218247 cites W1556041104 @default.
- W2149218247 cites W1669752 @default.
- W2149218247 cites W1966863561 @default.
- W2149218247 cites W1972258150 @default.
- W2149218247 cites W1981604398 @default.
- W2149218247 cites W1983985397 @default.
- W2149218247 cites W1989773904 @default.
- W2149218247 cites W1990323986 @default.
- W2149218247 cites W1996395111 @default.
- W2149218247 cites W1998121289 @default.
- W2149218247 cites W2006304620 @default.
- W2149218247 cites W2011911729 @default.
- W2149218247 cites W2012467784 @default.
- W2149218247 cites W2017814565 @default.
- W2149218247 cites W2021969754 @default.
- W2149218247 cites W2021980560 @default.
- W2149218247 cites W2025328550 @default.
- W2149218247 cites W2026321517 @default.
- W2149218247 cites W2026854248 @default.
- W2149218247 cites W2026974411 @default.
- W2149218247 cites W2027872603 @default.
- W2149218247 cites W2027968656 @default.
- W2149218247 cites W2028677282 @default.
- W2149218247 cites W2030040935 @default.
- W2149218247 cites W2030672925 @default.
- W2149218247 cites W2031140952 @default.
- W2149218247 cites W2032632993 @default.
- W2149218247 cites W2052137108 @default.
- W2149218247 cites W2052296388 @default.
- W2149218247 cites W2055402613 @default.
- W2149218247 cites W2066633305 @default.
- W2149218247 cites W2067009451 @default.
- W2149218247 cites W2073872748 @default.
- W2149218247 cites W2080729755 @default.
- W2149218247 cites W2094449502 @default.
- W2149218247 cites W2099501149 @default.
- W2149218247 cites W2101739028 @default.
- W2149218247 cites W2104793872 @default.
- W2149218247 cites W2105339863 @default.
- W2149218247 cites W2116357047 @default.
- W2149218247 cites W2122448988 @default.
- W2149218247 cites W2132038283 @default.
- W2149218247 cites W2135023527 @default.
- W2149218247 cites W2136371752 @default.
- W2149218247 cites W2137349390 @default.
- W2149218247 cites W2137728233 @default.
- W2149218247 cites W2138864265 @default.
- W2149218247 cites W2139497148 @default.
- W2149218247 cites W2140959273 @default.
- W2149218247 cites W2141660633 @default.
- W2149218247 cites W2143180769 @default.
- W2149218247 cites W2143305725 @default.
- W2149218247 cites W2148317686 @default.
- W2149218247 cites W2164679795 @default.
- W2149218247 cites W2165547088 @default.
- W2149218247 cites W2168429791 @default.
- W2149218247 cites W2171679984 @default.
- W2149218247 cites W2171863503 @default.
- W2149218247 cites W2192364703 @default.
- W2149218247 cites W2293688754 @default.
- W2149218247 cites W2320277557 @default.
- W2149218247 cites W2321130061 @default.
- W2149218247 cites W2325848438 @default.
- W2149218247 cites W2327595799 @default.
- W2149218247 cites W2328069407 @default.
- W2149218247 cites W2504011513 @default.
- W2149218247 cites W2519675171 @default.
- W2149218247 doi "https://doi.org/10.1016/s1359-6454(99)00294-3" @default.
- W2149218247 hasPublicationYear "2000" @default.
- W2149218247 type Work @default.
- W2149218247 sameAs 2149218247 @default.
- W2149218247 citedByCount "585" @default.
- W2149218247 countsByYear W21492182472012 @default.
- W2149218247 countsByYear W21492182472013 @default.
- W2149218247 countsByYear W21492182472014 @default.
- W2149218247 countsByYear W21492182472015 @default.
- W2149218247 countsByYear W21492182472016 @default.
- W2149218247 countsByYear W21492182472017 @default.
- W2149218247 countsByYear W21492182472018 @default.
- W2149218247 countsByYear W21492182472019 @default.
- W2149218247 countsByYear W21492182472020 @default.
- W2149218247 countsByYear W21492182472021 @default.
- W2149218247 countsByYear W21492182472022 @default.
- W2149218247 countsByYear W21492182472023 @default.
- W2149218247 crossrefType "journal-article" @default.
- W2149218247 hasAuthorship W2149218247A5065476124 @default.
- W2149218247 hasConcept C111919701 @default.
- W2149218247 hasConcept C119599485 @default.
- W2149218247 hasConcept C127413603 @default.
- W2149218247 hasConcept C132651336 @default.
- W2149218247 hasConcept C136525101 @default.
- W2149218247 hasConcept C142724271 @default.