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- W2149234605 abstract "Owing to the high power density, long life time and environmentally friendly characteristics, micro-supercapacitors have attracted much attention for powering microelectromechanical systems (MEMS) devices. This paper describes the fabrication and performance of a planar micro-supercapacitor. The fabrication process is large scale and IC compatible, and thus it can be integrated with microelectronics. The device, made of high conductivity graphitic carbon (GC) on nitrogen-doped polycrystalline 3C-SiC (poly-SiC), has very high charge/discharge rates. The incorporated nitrogen in the carbon electrode induces pseudo-capacitance and realizes nearly twice the specific capacitance value reported on carbon nanotube (CNT) supercapacitors." @default.
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- W2149234605 date "2011-06-01" @default.
- W2149234605 modified "2023-09-27" @default.
- W2149234605 title "Graphitization of n-type polycrystalline silicon carbide and its application for micro- supercapacitors" @default.
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- W2149234605 doi "https://doi.org/10.1109/transducers.2011.5969784" @default.
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